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Ivan Ohlídal, Daniel Franta

Ellipsometry of thin film systems

Progress in Optics 41 (2000) 181-282

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You can also contact one of the authors: ohlidal@physics.muni.cz, franta@physics.muni.cz

Citing Articles

  1. Franta D., Ohlídal I., Klapetek P., Pokorný P., Ohlídal M.,
    Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy,
    Surface and Interface Analysis 32 (2001) 91–94
  2. Ohlídal I., Franta D., Frumar M., Jedelský J., Navrátil K.,
    Complete optical analysis of amorphous As–S chalcogenide thin films by the combined spectrophotometric method,
    Journal of Optoelectronics and Advanced Materials 3 (2001) 873–878
  3. Postava K., Sueki H., Aoyama M., Yamaguchi T., Murakami K., Igasaki Y.,
    Doping effects on optical properties of epitaxial ZnO layers determined by spectroscopic ellipsometry,
    Applied Surface Science 175 (2001) 543–548
  4. Franta D., Zajíčková L., Ohlídal I., Janča J.,
    Optical characterization of diamond-like carbon films,
    Vacuum 61 (2001) 279–283
  5. Sánchez-Soto L. L., Monzón J. J., Yonte T., Cariñena J. F.,
    Simple trace criterion for classification of multilayers,
    Optics Letters 26 (2001) 1400–1402
  6. Klapetek P., Ohlídal I., Franta D., Pokorný P.,
    Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method,
    Surface and Interface Analysis 33 (2002) 559–564
  7. Franta D., Ohlídal I., Klapetek P., Pokorný P.,
    Characterization of the boundaries of thin films of TiO2 by atomic force microscopy and optical methods,
    Surface and Interface Analysis 34 (2002) 759–762
  8. Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
    Influence of overlayers on determination of the optical constants of ZnSe thin films,
    Journal of Applied Physics 92 (2002) 1873–1880
  9. Franta D., Zajíčková L., Ohlídal I., Janča J., Veltruská K.,
    Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry,
    Diamond and Related Materials 11 (2002) 105–117
  10. Yonte T., Monzón J. J., Sánchez-Soto L. L., Cariñena J. F., López-Lacasta C.,
    Understanding multilayers from a geometrical viewpoint,
    Journal of the Optical Society of America A 19 (2002) 603–609
  11. Franta D., Zajíčková L., Buršíková V., Ohlídal I.,
    New dispersion model of the optical constants of the DLC films,
    Acta Physica Slovaca 53 (2003) 373–384
  12. Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
    Optical constants of ZnTe and ZnSe epitaxial thin films,
    Acta Physica Slovaca 53 (2003) 95–104
  13. Franta D., Ohlídal I., Buršíková V., Zajíčková L.,
    Optical properties of diamond-like carbon films containing SiOx,
    Diamond and Related Materials 12 (2003) 1532–1538
  14. Franta D., Ohlídal I., Klapetek P., Ohlídal M.,
    Characterization of thin oxide films on GaAs substrates by optical methods and atomic force microscopy,
    Surface and Interface Analysis 36 (2004) 1203–1206
  15. Franta D., Ohlídal I., Klapetek P., Roca i Cabarrocas P.,
    Complete characterization of rough polymorphous silicon films by atomic force microscopy and the combined method of spectroscopic ellipsometry and spectroscopic reflectometry,
    Thin Solid Films 455–456 (2004) 399–403
  16. Ohlídal I., Franta D., Frumar M., Jedelský J., Omasta J.,
    Influence of composition, exposure and thermal annealing on optical properties of As–S chalcogenide thin films,
    Chalcogenide Letters 1 (2004) 1–10
  17. Franta D., Ohlídal I., Buršíková V., Zajíčková L.,
    Optical properties of diamond-like carbon films containing SiOx studied by the combined method of spectroscopic ellipsometry and spectroscopic reflectometry,
    Thin Solid Films 455–456 (2004) 393–398
  18. Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
    Optical properties of ZnTe films prepared by molecular beam epitaxy,
    Thin Solid Films 468 (2004) 193–202
  19. Ohlídal I., Franta D., Klapetek P.,
    Combination of optical methods and atomic force microscopy at characterization of thin film systems,
    Acta Physica Slovaca 55 (2005) 271–294
  20. Franta D., Ohlídal I.,
    Comparison of effective medium approximation and Rayleigh–Rice theory concerning ellipsometric characterization of rough surfaces,
    Optics Communications 248 (2005) 459–467
  21. Šiler M., Ohlídal I., Franta D., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
    Optical characterization of double layers containing epitaxial ZnSe and ZnTe films,
    Journal of Modern Optics 52 (2005) 583–602
  22. Franta D., Ohlídal I., Mistrík J., Yamaguchi T., Hu G. J., Dai N.,
    Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions,
    Applied Surface Science 244 (2005) 338–342
  23. Franta D., Ohlídal I., Petrýdes D.,
    Optical characterization of TiO2 thin films by the combined method of spectroscopic ellipsometry and spectroscopic photometry,
    Vacuum 80 (2005) 159–162
  24. Franta D., Negulescu B., Thomas L., Dahoo P. R., Guyot M., Ohlídal I., Mistrík J., Yamaguchi T.,
    Optical properties of NiO thin films prepared by pulsed laser deposition technique,
    Applied Surface Science 244 (2005) 426–430
  25. Mistrík J., Yamaguchi T., Franta D., Ohlídal I., Hu G. J., Dai N.,
    Optical properties of slightly rough LaNiO3 thin films studied by spectroscopic ellipsometry and reflectometry,
    Applied Surface Science 244 (2005) 431–434
  26. Ohlídal I., Franta D., Šiler M., Vižďa F., Frumar M., Jedelský J., Omasta J.,
    Comparison of dispersion models in the optical characterization of As–S chalcogenide thin films,
    Journal of Non-Crystalline Solids 352 (2006) 5633–5641
  27. Franta D., Ohlídal I.,
    Influence of lateral dimensions of the irregularities on the optical quantities of rough surfaces,
    Journal of Optics A: Pure and Applied Optics 8 (2006) 763–774
  28. Valtr M., Ohlídal I., Franta D.,
    Optical characterization of carbon films prepared by PECVD using ellipsometry and reflectometry,
    Czechoslovak Journal of Physics 56 (2006) B1103–B1109
  29. Franta D., Buršíková V., Ohlídal I., Sťahel P., Ohlídal M., Nečas D.,
    Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films,
    Diamond and Related Materials 16 (2007) 1331–1335
  30. Franta D., Ohlídal I., Nečas D.,
    Influence of cross-correlation effects on the optical quantities of rough films,
    Optics Express 16 (2008) 7789–7803
  31. Franta D., Buršíková V., Nečas D., Zajíčková L.,
    Modeling of optical constants of diamond-like carbon,
    Diamond and Related Materials 17 (2008) 705–708
  32. Franta D., Zajíčková L., Karásková M., Jašek O., Nečas D., Klapetek P., Valtr M.,
    Optical characterization of ultrananocrystalline diamond films,
    Diamond and Related Materials 17 (2008) 1278–1282
  33. Franta D., Ohlídal I., Nečas D.,
    Optical quantities of rough films calculated by Rayleigh-Rice theory,
    Physica Status Solidi C 5 (2008) 1395–1398
  34. Ohlídal I., Nečas D., Franta D.,
    Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies,
    Physica Status Solidi C 5 (2008) 1399–1402
  35. Valtr M., Klapetek P., Buršíková V., Ohlídal I., Franta D.,
    Surface morphology of amorphous hydrocarbon thin films deposited in pulsed radiofrequency discharge,
    Chemické listy 102 (2008) s1529–s1532
  36. Ohlídal I., Nečas D., Franta D., Buršíková V.,
    Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry,
    Diamond and Related Materials 18 (2009) 364–367
  37. Franta D., Nečas D., Ohlídal I., Hrdlička M., Pavlišta M., Frumar M., Ohlídal M.,
    Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films,
    Journal of Optoelectronics and Advanced Materials 11 (2009) 1891–1898
  38. Franta D., Nečas D., Zajíčková L., Buršíková V., Cobet C.,
    Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range,
    Diamond and Related Materials 19 (2010) 114–122
  39. Franta D., Nečas D., Ohlídal I.,
    Anisotropy-enhanced depolarization on transparent film/substrate system,
    Thin Solid Films 519 (2011) 2637-2640
  40. Ohlídal I., Ohlídal M., Nečas D., Franta D., Buršíková V.,
    Optical characterisation of SiOxCyHz thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry,
    Thin Solid Films 519 (2011) 2874-2876
  41. Franta D., Nečas D., Zajíčková L., Ohlídal I., Stuchlík J., Chvostová D.,
    Application of sum rule to the dispersion model of hydrogenated amorphous silicon,
    Thin Solid Films 539 (2013) 233-244
  42. Franta D., Nečas D., Zajíčková L.,
    Application of Thomas–Reiche–Kuhn sum rule to construction of advanced dispersion models,
    Thin Solid Films 534 (2013) 432-441
  43. Nečas D., Franta D., Ohlídal I., Poruba A., Wostrý P.,
    Ellipsometric characterization of inhomogeneous non-stoichiometric silicon nitride films,
    Surface and Interface Analysis 45 (2013) 1188-1192
  44. Franta D., Ohlídal I.,
    Proc: Calculation of the optical quantities characterizing inhomogeneous thin film using a new mathematical procedure based on the matrix formalism and Drude approximation,
    Proceedings of 12th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, SPIE, 12th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, SPIE (2001) 207-212

Cited Articles

  1. Ohlídal I., Franta D., Pinčík E., Ohlídal M.,
    Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy,
    Surface and Interface Analysis 28 (1999) 240–244
  2. Franta D., Ohlídal I.,
    Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
    Journal of Modern Optics 45 (1998) 903–934
  3. Franta D., Ohlídal I.,
    Statistical properties of the near-field speckle patterns of thin films with slightly rough boundaries,
    Optics Communications 147 (1998) 349–358
  4. Zajíčková L., Ohlídal I., Janča J.,
    Plasma-Enhanced Chemical Vapour Deposition of Thin Films from Tetraethoxysilane and Methanol: Optical Properties and XPS Analyses,
    Thin Solid Films 280 (1996) 26–36
  5. Ohlídal I., Vižďa F., Ohlídal M.,
    Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries,
    Optical Engineering 34 (1995) 1761–1768
  6. Ohlídal I., Líbezný M.,
    Ellipsometric analysis of gallium arsenide surfaces,
    Surface and Interface Analysis 17 (1991) 171–176
  7. Ohlídal I., Schmidt E., Líbezný M.,
    Complete unambiguous optical characterization of double layers consisting of two strongly absorbing thin films by combined reflection and transmission ellipsometry,
    Applied Optics 29 (1990) 593–598
  8. Ohlídal I., Líbezný M.,
    Immersion ellipsometry of semiconductor surfaces,
    Surface and Interface Analysis 16 (1990) 46–53
  9. Ohlídal I., Schmidt E., Líbezný M., Tvarožek V., Novotný I.,
    Ellipsometric analysis of thin NiCr films,
    Thin Solid Films 169 (1989) 213–222
  10. Ohlídal I., Lukeš F.,
    Analysis of semiconductor surfaces with very thin native oxide layers by combined immersion and multiple angle of incidence ellipsometry,
    Applied Surface Science 35 (1988) 259–273
  11. Paneva A., Ohlídal I.,
    Multiple angle of incidence ellipsometric analysis of non-absorbing two-layer and three-layer systems,
    Thin Solid Films 145 (1986) 23–37
  12. Ohlídal I., Lukeš F.,
    Optical analysis of absorbing double layers by combined reflection and transmission ellipsometry,
    Thin Solid Films 115 (1984) 269–282
  13. Ohlídal I., Lukeš F.,
    Optical analysis of thin gold films by combined reflection and transmission ellipsometry,
    Thin Solid Films 85 (1981) 181–190
  14. Navrátil K., Ohlídal I., Lukeš F.,
    The physical structure of the interface between single-crystal GaAs and its oxide film,
    Thin Solid Films 56 (1979) 163–171
  15. Ohlídal I., Lukeš F., Navrátil K.,
    Rough silicon surfaces studied by optical methods,
    Surface Science 45 (1974) 91–116
  16. Ohlídal I., Lukeš F.,
    Calculation of the Ellipsometric Parameters Characterizing a Randomly Rough Surface by Means of The Stratton-Chu-Silver Integral,
    Optics Communications 7 (1973) 76–79
  17. Ohlídal I., Lukeš F.,
    Ellipsometric parameters of randomly rough surfaces,
    Optics Communications 5 (1972) 323-326
  18. Ohlídal I., Lukeš F.,
    Ellipsometric Parameters of Rough Surfaces and of a System Substrate-Thin Film with Rough Boundaries,
    Optica Acta 19 (1972) 817–843
  19. Ohlídal I., Navrátil K., Lukeš F.,
    Reflection of Light by a System of Nonabsorbing Isotropic Film-Nonabsorbing Isotropic Substrate with Randomly Rough Boundaries,
    Journal of the Optical Society of America 61 (1971) 1630–1639