Ivan Ohlídal, David Nečas, Daniel Franta
Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies
Physica Status Solidi C 5 (2008) 1399–1402
Two optical methods for the optical characterization of the statistically rough surfaces exhibiting wide intervals of spatial frequencies are presented. These methods employ the combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The first method is based on combining the scalar diffraction theory and effective medium theory while the second method combines the scalar diffraction theory with Rayleigh-Rice theory. Both the methods are applied to the optical characterization of statistically rough GaAs surfaces prepared by thermal oxidation. It is shown that both the methods can be utilized for characterization of these surfaces in a reasonable way, however, the latter is more suitable for this purpose. The results of the optical characterization of the selected rough GaAs surface are supported by those obtained using atomic force microscopy.
This article may also be available to you online
You can also contact one of the authors: ohlidal@physics.muni.cz, yeti@physics.muni.cz, franta@physics.muni.cz
Cited Articles
-
Buršíková V., Zajíčková L., Dvořák P., Valtr M., Buršík J., Bláhová O., Peřina V., Janča J.,
Influence of Silicon, Oxygen and Nitrogen Admixtures Upon the Properties of Plasma Deposited Amorphous Diamond-Like Carbon Coatings,
Journal of Advanced Oxidation Technologies 9 (2006) 232–236 -
Klapetek P., Ohlídal I., Montaigne-Ramil A., Bonanni A., Sitter H.,
Atomic force microscopy analysis of morphology of the upper boundaries of GaN thin films prepared by MOCVD,
Vacuum 80 (2005) 53–57 -
Franta D., Ohlídal I., Klapetek P., Ohlídal M.,
Characterization of thin oxide films on GaAs substrates by optical methods and atomic force microscopy,
Surface and Interface Analysis 36 (2004) 1203–1206 -
Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
Optical properties of ZnTe films prepared by molecular beam epitaxy,
Thin Solid Films 468 (2004) 193–202 -
Franta D., Zajíčková L., Ohlídal I., Janča J., Veltruská K.,
Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry,
Diamond and Related Materials 11 (2002) 105–117 -
Ohlídal I., Franta D.,
Ellipsometry of thin film systems,
Progress in Optics 41 (2000) 181-282 -
Franta D., Ohlídal I.,
Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
Journal of Modern Optics 45 (1998) 903–934 -
Ohlídal I., Lukeš F., Navrátil K.,
Rough silicon surfaces studied by optical methods,
Surface Science 45 (1974) 91–116