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Daniel Franta, Ivan Ohlídal, David Nečas

Influence of cross-correlation effects on the optical quantities of rough films

Optics Express 16 (2008) 7789–7803

Within the Rayleigh–Rice theory the influence of layer boundary roughness on coherently reflected light is expressed using very complex formulae. Therefore we deal with the simplification of these formulae by employing an approximation based on neglecting cross-correlation effects between both the rough boundaries. It is shown that if the mean distance of the boundaries (mean thickness) is sufficiently large in comparison with the lateral dimensions of the roughness it is possible to describe the individual boundaries of the layers by matrices corresponding to isolated rough surfaces. This fact enables us to simplify the formulae for the optical quantities in a substantial way, which also simplifies the numerical calculation needed for the inverse problem. This statement is illustrated by means of a numerical analysis simulating ellipsometric and reflectometric data of rough silicon dioxide layers placed onto silicon single crystal substrates.

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Cited Articles

  1. Franta D., Ohlídal I., Nečas D.,
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    Physica Status Solidi C 5 (2008) 1395–1398
  2. Franta D., Ohlídal I.,
    Influence of lateral dimensions of the irregularities on the optical quantities of rough surfaces,
    Journal of Optics A: Pure and Applied Optics 8 (2006) 763–774
  3. Franta D., Ohlídal I.,
    Comparison of effective medium approximation and Rayleigh–Rice theory concerning ellipsometric characterization of rough surfaces,
    Optics Communications 248 (2005) 459–467
  4. Ohlídal I., Franta D.,
    Ellipsometry of thin film systems,
    Progress in Optics 41 (2000) 181-282
  5. Franta D., Ohlídal I.,
    Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
    Journal of Modern Optics 45 (1998) 903–934
  6. Ohlídal I., Vižďa F., Ohlídal M.,
    Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries,
    Optical Engineering 34 (1995) 1761–1768
  7. Ohlídal I., Lukeš F.,
    Ellipsometric Parameters of Rough Surfaces and of a System Substrate-Thin Film with Rough Boundaries,
    Optica Acta 19 (1972) 817–843