Daniel Franta, Ivan Ohlídal, Jan Mistrík, Tomuo Yamaguchi, Gu Jin Hu, Ning Dai

Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions

Applied Surface Science 244 (2005) 338–342

In this paper the results concerning the optical characterization of the PZT film are presented. The multi-sample modification of the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used to obtain the spectral dependences of the optical constants of this film within the spectral region 190–1000 nm. Within the near-UV region the sharp features of the spectral dependences of the optical constants are found. These features are explained by the existence of the narrow bands of the 4d and 3d valence electrons of the transition metals Zr and Ti. Within the optical characterization of the PZT film the defects consisting of boundary roughness and refractive index profile are respected.

Download PDF (134 kB)

This article may also be available to you online

You can also contact one of the authors: franta@physics.muni.cz, ohlidal@physics.muni.cz

Citing Articles

1. Jiang Y. P., Tang X. G., Liu Q. X., Li Q., Ding A. L.,
   Optical properties of Pb(Zr_0.53Ti_0.47)O₃ thin films on Pt-coated Si substrates measured by spectroscopic ellipsometry in the UV-vis-NIR,
   Materials Science and Engineering B 137 (2007) 304–309
2. Chvostová D., Pajasová L., Železný V.,
   Optical properties of PZT thin films by spectroscopic ellipsometry and optical reflectivity,
   Physica Status Solidi C 5 (2008) 1362–1365
3. Galca A. C., Stancu V., Husanu M. A., Dragoi C., Gheorghe N. G., Trupina L., Enculescu M., Vasile E.,
   Substrate-target distance dependence of structural and optical properties in case of Pb(Zr,Ti)O-3 films obtained by pulsed laser deposition,
   Applied Surface Science 257 (2011) 5938-5943

Cited Articles

1. Klapetek P., Ohlídal I., Navrátil K.,
   Atomic force microscopy analysis of statistical roughness of GaAs surfaces originated by thermal oxidation,
   Microchimica Acta 147 (2004) 175–180
2. Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
   Influence of overlayers on determination of the optical constants of ZnSe thin films,
   Journal of Applied Physics 92 (2002) 1873–1880
3. Franta D., Zajíčková L., Ohlídal I., Janča J., Veltruská K.,
   Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry,
   Diamond and Related Materials 11 (2002) 105–117
4. Franta D., Ohlídal I., Klapetek P., Pokorný P.,
   Characterization of the boundaries of thin films of TiO₂ by atomic force microscopy and optical methods,
   Surface and Interface Analysis 34 (2002) 759–762
5. Ohlídal I., Franta D.,
   Ellipsometry of thin film systems,
   Progress in Optics 41 (2000) 181-282
6. Franta D., Ohlídal I.,
   Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
   Journal of Modern Optics 45 (1998) 903–934