Daniel Franta, Ivan Ohlídal
Proc: Calculation of the optical quantities characterizing inhomogeneous thin film using a new mathematical procedure based on the matrix formalism and Drude approximation
Proceedings of 12th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, SPIE, 12th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, SPIE (2001) pp.207-212
Published by Published by SPIE – The International Society for Optical Engineering, Bellingham, Washington, USA
The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.
You may also contact one of the authors: franta@physics.muni.cz, ohlidal@physics.muni.cz
Citing Articles
- Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
Optical constants of ZnTe and ZnSe epitaxial thin films,
Acta Physica Slovaca 53 (2003) 95–104 - Franta D., Ohlídal I., Klapetek P., Ohlídal M.,
Characterization of thin oxide films on GaAs substrates by optical methods and atomic force microscopy,
Surface and Interface Analysis 36 (2004) 1203–1206 - Franta D., Zajíčková L., Karásková M., Jašek O., Nečas D., Klapetek P., Valtr M.,
Optical characterization of ultrananocrystalline diamond films,
Diamond and Related Materials 17 (2008) 1278–1282
Cited articles
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Ohlídal I., Franta D.,
Ellipsometry of thin film systems,
Progress in Optics 41 (2000) 181-282 -
Ohlídal I., Franta D.,
Matrix formalism for imperfect thin films,
Acta Physica Slovaca 50 (2000) 489–500