Ivan Ohlídal, Karel Navrátil, František Lukeš
Reflection of Light by a System of Nonabsorbing Isotropic Film-Nonabsorbing Isotropic Substrate with Randomly Rough Boundaries
Journal of the Optical Society of America 61 (1971) 1630–1639
The reflection of light by a system consisting of a nonabsorbing isotropic film and nonabsorbing isotropic substrate with both boundaries (air-film and film-substrate) rough is considered. The scalar theory of light scattering on such a system has been developed. The formulas characterizing both the coherent and the incoherent components of the reflected-light flux have been derived for the case of the identical film (both boundaries are rough, the air-film boundary is a copy of the film- substrate boundary) as well as for the general film (both boundaries are rough and different). The numerical results of the calculation performed for a system of SiO2-Si are presented and the experimental results for the case of art identical film of SiO2 on a Si single crystal are given. The agreement between the theory and the experiment is fairly good. The correctness of the film thickness and its index of refraction depends to a fairly high degree on the roughness of the air-film and film-substrate boundaries.
This article may also be available to you online
You can also contact one of the authors: ohlidal@physics.muni.cz
Citing Articles
- Franta D., Ohlídal I., Munzar D., Hora J., Navrátil K., Manfredotti C., Fizzotti F., Vittone E.,
Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry,
Thin Solid Films 343–344 (1999) 295–298 - Ohlídal I., Franta D.,
Ellipsometry of thin film systems,
Progress in Optics 41 (2000) 181-282 - Pavelka R., Ohlídal I., Hlávka J., Franta D., Sitter H.,
Optical characterization of thin films with randomly rough boundaries using the photovoltage method,
Thin Solid Films 366 (2000) 43–50 - Ohlídal I., Franta D., Ohlídal M., Navrátil K.,
Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances,
Applied Optics 40 (2001) 5711–5717 - Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
Optical constants of ZnTe and ZnSe epitaxial thin films,
Acta Physica Slovaca 53 (2003) 95–104 - Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
Optical properties of ZnTe films prepared by molecular beam epitaxy,
Thin Solid Films 468 (2004) 193–202 - Šiler M., Ohlídal I., Franta D., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
Optical characterization of double layers containing epitaxial ZnSe and ZnTe films,
Journal of Modern Optics 52 (2005) 583–602 - Franta D., Ohlídal I.,
Influence of lateral dimensions of the irregularities on the optical quantities of rough surfaces,
Journal of Optics A: Pure and Applied Optics 8 (2006) 763–774