Main page | Journal list | Log-in

Daniel Franta, Lenka Zajíčková, Ivan Ohlídal, Jan Janča

Optical characterization of diamond-like carbon films

Vacuum 61 (2001) 279–283

In this contribution the results achieved by the optical characterization of diamond like carbon (DLC) films are presented. A multi-sample modification of variable angle of incidence spectroscopic ellipsometry (VASE) is used to determine the values of the thicknesses and spectral dependences of the optical constants of these films. It is shown that this optical method is very suitable for characterizing the films studied because the influences of some defects of these films are suppressed within this method. Further the spectral dependences of the optical constants determined for the DLC films studied are interpreted using a new model of dispersion based on the existence of two oscillators corresponding to both the π → π* and σ → σ* interband transitions. Within this model of dispersion of the optical constants the concept of the band gap is respected as well.

Download PDF (107 kB)

This article may also be available to you online

You can also contact one of the authors:,,

Citing Articles

  1. Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
    Influence of overlayers on determination of the optical constants of ZnSe thin films,
    Journal of Applied Physics 92 (2002) 1873–1880
  2. Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
    Optical constants of ZnTe and ZnSe epitaxial thin films,
    Acta Physica Slovaca 53 (2003) 95–104
  3. Tremsin A. S., Siegmund O. H.W.,
    UV photoemission efficiency of polycrystalline CVD diamond films,
    Diamond and Related Materials 14 (2005) 48–53

Cited Articles

  1. Ohlídal I., Franta D.,
    Ellipsometry of thin film systems,
    Progress in Optics 41 (2000) 181-282
  2. Ohlídal I., Franta D., Pinčík E., Ohlídal M.,
    Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy,
    Surface and Interface Analysis 28 (1999) 240–244
  3. Zajíčková L., Buršíková V., Franta D.,
    The influence of substrate emissivity on plasma enhanced CVD of diamond-like carbon films,
    Czechoslovak Journal of Physics 49 (1999) 1213–1228