Daniel Franta, Ivan Ohlídal, David Nečas

Optical quantities of rough films calculated by Rayleigh-Rice theory

Physica Status Solidi C 5 (2008) 1395–1398

Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy.

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You can also contact one of the authors: franta@physics.muni.cz, ohlidal@physics.muni.cz, yeti@physics.muni.cz

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Cited Articles

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3. Franta D., Ohlídal I., Klapetek P., Roca i Cabarrocas P.,
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