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Daniel Franta, Ivan Ohlídal, David Nečas

Optical quantities of rough films calculated by Rayleigh-Rice theory

Physica Status Solidi C 5 (2008) 1395–1398

Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy.

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Citing Articles

  1. Franta D., Ohlídal I., Nečas D.,
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Cited Articles

  1. Franta D., Ohlídal I.,
    Influence of lateral dimensions of the irregularities on the optical quantities of rough surfaces,
    Journal of Optics A: Pure and Applied Optics 8 (2006) 763–774
  2. Franta D., Ohlídal I.,
    Comparison of effective medium approximation and Rayleigh–Rice theory concerning ellipsometric characterization of rough surfaces,
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  3. Franta D., Ohlídal I., Klapetek P., Roca i Cabarrocas P.,
    Complete characterization of rough polymorphous silicon films by atomic force microscopy and the combined method of spectroscopic ellipsometry and spectroscopic reflectometry,
    Thin Solid Films 455–456 (2004) 399–403
  4. Franta D., Ohlídal I., Frumar M., Jedelský J.,
    Expression of the optical constants of chalcogenide thin films using the new parameterization dispersion model,
    Applied Surface Science 212–213 (2003) 116–121
  5. Franta D., Ohlídal I., Klapetek P., Pokorný P.,
    Characterization of the boundaries of thin films of TiO2 by atomic force microscopy and optical methods,
    Surface and Interface Analysis 34 (2002) 759–762
  6. Franta D., Ohlídal I., Klapetek P.,
    Analysis of slightly rough thin films by optical methods and AFM,
    Mikrochimica Acta 132 (2000) 443–447
  7. Ohlídal I., Franta D.,
    Ellipsometry of thin film systems,
    Progress in Optics 41 (2000) 181-282
  8. Franta D., Ohlídal I.,
    Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
    Journal of Modern Optics 45 (1998) 903–934
  9. Ohlídal I., Lukeš F., Navrátil K.,
    Rough silicon surfaces studied by optical methods,
    Surface Science 45 (1974) 91–116