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Ivan Ohlídal, František Lukeš

Ellipsometric parameters of randomly rough surfaces

Optics Communications 5 (1972) 323-326

The influence of the surface roughness on the ellipsometric parameters Δ and ψ is considered. The Helmholtz-Kirchhoff integral has been chosen as a starting point. Having used several simplifications (justified for slightly rough surfaces) we derived the equation representing a definition of Δ and ψ in the case of an isotropic material with rough surface.

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Citing Articles

  1. Ohlídal I., Franta D.,
    Ellipsometry of thin film systems,
    Progress in Optics 41 (2000) 181-282
  2. Franta D., Ohlídal I.,
    Influence of lateral dimensions of the irregularities on the optical quantities of rough surfaces,
    Journal of Optics A: Pure and Applied Optics 8 (2006) 763–774