Ivan Ohlídal, Daniel Franta, Miloslav Frumar, Jaroslav Jedelský, Karel Navrátil

Complete optical analysis of amorphous As–S chalcogenide thin films by the combined spectrophotometric method

Journal of Optoelectronics and Advanced Materials 3 (2001) 873–878

In this paper a combined spectrophotometric method is used to analyzed As–S chalcogenide thin films. This method is based on the simultaneous interpretation of experimental data corresponding to the reflectance from the ambient side, reflectance from the substrate side and transmittance of the chalcogenide films deposited onto the glass substrate. It is shown that this method is usable for the optical characterization of the chalcogenide films even when these films exhibit an inhomogeneity formed by a refractive index profile. Within this method our dispersion model of the optical constants of amorphous materials is used. This means that the values of the dispersion parameters determining the spectral dependences of the optical constants of the As–S chalcogenide material are evaluated. In the paper the advantages of the combined method mentioned are discussed from the practical point of view.

Download PDF (234 kB)

This article may also be available to you online

You can also contact one of the authors: ohlidal@physics.muni.cz, franta@physics.muni.cz

Citing Articles

1. Ohlídal I., Franta D., Frumar M., Jedelský J., Omasta J.,
   Influence of composition, exposure and thermal annealing on optical properties of As–S chalcogenide thin films,
   Chalcogenide Letters 1 (2004) 1–10
2. Ohlídal I., Franta D., Šiler M., Vižďa F., Frumar M., Jedelský J., Omasta J.,
   Comparison of dispersion models in the optical characterization of As–S chalcogenide thin films,
   Journal of Non-Crystalline Solids 352 (2006) 5633–5641
3. Franta D., Nečas D., Ohlídal I., Hrdlička M., Pavlišta M., Frumar M., Ohlídal M.,
   Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films,
   Journal of Optoelectronics and Advanced Materials 11 (2009) 1891–1898
4. Solieman A., Abu-sehly A. A.,
   Determination of the optical constants of amorphous As(x)S(100-x) films using effective-medium approximation and OJL model,
   Materials Chemistry and Physics 129 (2011) 1000-1005

Cited Articles

1. Franta D., Ohlídal I., Frumar M., Jedelský J.,
   Optical characterization of chalcogenide thin films,
   Applied Surface Science 175–176 (2001) 555–561
2. Ohlídal I., Franta D.,
   Matrix formalism for imperfect thin films,
   Acta Physica Slovaca 50 (2000) 489–500
3. Ohlídal I., Franta D.,
   Ellipsometry of thin film systems,
   Progress in Optics 41 (2000) 181-282
4. Franta D., Ohlídal I., Munzar D., Hora J., Navrátil K., Manfredotti C., Fizzotti F., Vittone E.,
   Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry,
   Thin Solid Films 343–344 (1999) 295–298
5. Franta D., Ohlídal I., Munzar D.,
   Parameterisation of the model of dispersion dependences of solid state optical constants,
   Acta Physica Slovaca 48 (1998) 451–458