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Ivan Ohlídal, David Nečas, Daniel Franta, Vilma Buršíková

Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry

Diamond and Related Materials 18 (2009) 364–367

Optical characterization of diamond-like carbon (DLC) films non-uniform in thickness is performed using spectroscopic phase-modulated ellipsometry. This characterization is based on new formulas for the associated ellipsometric parameters of thin films exhibiting a wedge-shaped thickness non-uniformity. These formulas express the associated ellipsometric parameters by means of the density of distribution of local film thickness. The spectral dependences of the optical constants of these non-uniform DLC films are expressed using the dispersion model based on parametrization of density of electronic states. It is shown that this model of the thickness non-uniformity provides a relatively good agreement between the experimental and theoretical data, indicating that the results of the optical characterization of the non-uniform DLC films are close to the correct results. Moreover, it is shown that the model of uniform thin films is unsuitable for the optical characterization of the non-uniform DLC films studied.

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Cited Articles

  1. Franta D., Nečas D., Zajíčková L.,
    Models of dielectric response in disordered solids,
    Optics Express 15 (2007) 16230–16244
  2. Franta D., Ohlídal I., Frumar M., Jedelský J.,
    Expression of the optical constants of chalcogenide thin films using the new parameterization dispersion model,
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  3. Ohlídal I., Franta D.,
    Ellipsometry of thin film systems,
    Progress in Optics 41 (2000) 181-282
  4. Zajíčková L., Buršíková V., Franta D.,
    The influence of substrate emissivity on plasma enhanced CVD of diamond-like carbon films,
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