Ivan Ohlídal, David Nečas, Daniel Franta, Vilma Buršíková
Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry
Diamond and Related Materials 18 (2009) 364–367
Optical characterization of diamond-like carbon (DLC) films non-uniform in thickness is performed using spectroscopic phase-modulated ellipsometry. This characterization is based on new formulas for the associated ellipsometric parameters of thin films exhibiting a wedge-shaped thickness non-uniformity. These formulas express the associated ellipsometric parameters by means of the density of distribution of local film thickness. The spectral dependences of the optical constants of these non-uniform DLC films are expressed using the dispersion model based on parametrization of density of electronic states. It is shown that this model of the thickness non-uniformity provides a relatively good agreement between the experimental and theoretical data, indicating that the results of the optical characterization of the non-uniform DLC films are close to the correct results. Moreover, it is shown that the model of uniform thin films is unsuitable for the optical characterization of the non-uniform DLC films studied.
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You can also contact one of the authors: ohlidal@physics.muni.cz, yeti@physics.muni.cz, franta@physics.muni.cz, vilmab@physics.muni.cz
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Cited Articles
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Models of dielectric response in disordered solids,
Optics Express 15 (2007) 16230–16244 -
Franta D., Ohlídal I., Frumar M., Jedelský J.,
Expression of the optical constants of chalcogenide thin films using the new parameterization dispersion model,
Applied Surface Science 212–213 (2003) 116–121 -
Ohlídal I., Franta D.,
Ellipsometry of thin film systems,
Progress in Optics 41 (2000) 181-282 -
Zajíčková L., Buršíková V., Franta D.,
The influence of substrate emissivity on plasma enhanced CVD of diamond-like carbon films,
Czechoslovak Journal of Physics 49 (1999) 1213–1228