Main page | Journal list | Log-in

Daniel Franta, Lenka Zajíčková, Ivan Ohlídal, Jan Janča, Kateřina Veltruská

Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry

Diamond and Related Materials 11 (2002) 105–117

In the first part, thicknesses and spectral dependences of the optical constants of the diamond like carbon (DLC) films were determined without any parameterization in the range 240–830 nm by multi-sample modification of variable angle spectroscopic ellipsometry (VASE). DLC films were prepared by plasma enhanced chemical vapor deposition (PECVD) onto silicon single crystal substrates. It was shown that the influence of some defects of the DLC films on the optical constants is suppressed by applying the method of multi-sample modification of VASE. In the second part, the spectral dependences of the determined optical constants were interpreted using a recently developed model of dispersion based on the modified Lorentz oscillator. Two modified Lorentz oscillators corresponding to both π → π* and σ → σ* interband transitions were taken into account. Within this model of dispersion of the optical constants the concept of the band gap and the existence of localized energy states within the band gap were taken into account as well.

Download PDF (367 kB)

This article may also be available to you online

You can also contact one of the authors: franta@physics.muni.cz, lenkaz@physics.muni.cz, ohlidal@physics.muni.cz

Citing Articles

  1. Zajíčková L., Buršíková V., Peřina V., Macková A., Janča J.,
    Correlation Between SiOx Content and Properties of DLC : SiOx Films Prepared by PECVD,
    Surface and Coatings Technology 174 (2003) 281–285
  2. Franta D., Zajíčková L., Buršíková V., Ohlídal I.,
    New dispersion model of the optical constants of the DLC films,
    Acta Physica Slovaca 53 (2003) 373–384
  3. Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
    Optical constants of ZnTe and ZnSe epitaxial thin films,
    Acta Physica Slovaca 53 (2003) 95–104
  4. Zajíčková L., Rudakowski S., Becker H.-W., Meyer D., Valtr M., Wiesemann K.,
    Study of plasma polymerization from acetylene in pulsed r.f. discharges,
    Thin Solid Films 425 (2003) 72-84
  5. Akaoglu B., Atilgan I., Katircioglu B.,
    Thickness and optical constant distributions of PECVD a-SiCx:H thin films along electrode radial direction,
    Thin Solid Films 437 (2003) 257–265
  6. Zapien J. A., Collins R. W.,
    Determination of the optical functions of carbon-based materials using transmittance, reflectance and spectroscopic ellipsometry – A critical review,
    New Diamond and Frontier Carbon Technology 14 (2004) 129–145
  7. Franta D., Ohlídal I., Mistrík J., Yamaguchi T., Hu G. J., Dai N.,
    Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions,
    Applied Surface Science 244 (2005) 338–342
  8. Franta D., Negulescu B., Thomas L., Dahoo P. R., Guyot M., Ohlídal I., Mistrík J., Yamaguchi T.,
    Optical properties of NiO thin films prepared by pulsed laser deposition technique,
    Applied Surface Science 244 (2005) 426–430
  9. Mistrík J., Yamaguchi T., Franta D., Ohlídal I., Hu G. J., Dai N.,
    Optical properties of rough LaNiO3 thin films studied by spectroscopic ellipsometry and reflectometry,
    Applied Surface Science 244 (2005) 431-434
  10. Mistrík J., Yamaguchi T., Franta D., Ohlídal I., Hu G. J., Dai N.,
    Optical properties of slightly rough LaNiO3 thin films studied by spectroscopic ellipsometry and reflectometry,
    Applied Surface Science 244 (2005) 431–434
  11. Franta D., Buršíková V., Ohlídal I., Zajíčková L., Sťahel P.,
    Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films,
    Diamond and Related Materials 14 (2005) 1795–1798
  12. Singha A., Ghosh A., Roy A., Ray N. R.,
    Quantitative analysis of hydrogenated diamondlike carbon films by visible Raman spectroscopy,
    Journal of Applied Physics 100 (2006) 044910
  13. Franta D., Buršíková V., Ohlídal I., Sťahel P., Ohlídal M., Nečas D.,
    Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films,
    Diamond and Related Materials 16 (2007) 1331–1335
  14. Franta D., Buršíková V., Nečas D., Zajíčková L.,
    Modeling of optical constants of diamond-like carbon,
    Diamond and Related Materials 17 (2008) 705–708
  15. Ohlídal I., Nečas D., Franta D.,
    Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies,
    Physica Status Solidi C 5 (2008) 1399–1402
  16. Ohlídal M., Ohlídal I., Klapetek P., Nečas D., Buršíková V.,
    Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films,
    Diamond and Related Materials 18 (2009) 384–387
  17. Smietana M., Korwin-Pawlowski M.L., Grabarczyk J., Szmidt J.,
    Correlation between thickness and optical properties of thin diamond-like carbon films deposited with RF PACVD method,
    Materials Science and Engineering B 165 (2009) 132–134
  18. Franta D., Nečas D., Zajíčková L., Buršíková V.,
    Limitations and possible improvements of DLC dielectric response model based on parameterization of density of states,
    Diamond and Related Materials 18 (2009) 413–418
  19. Zhou Y., Wu G.-S., Dai W., Li H.-B., Wang A.-Y.,
    Accurate determination of optical constants and thickness of absorbing thin films by a combined ellipsometry and spectrophotometry approach,
    Review of Scientific Instruments 59 (2010) 2356–2363
  20. Franta D., Nečas D., Zajíčková L., Buršíková V., Cobet C.,
    Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range,
    Diamond and Related Materials 19 (2010) 114–122
  21. Ohlídal I., Ohlídal M., Franta D., Čudek V., Buršíková V., Klapetek P., Jákl M.,
    Proc: Optical measurement of mechanical stresses in diamond-like carbon films,
    Proceedings of 8-th International Symposium on Laser Metrology, SPIE (2005) 717-728

Cited Articles

  1. Franta D., Ohlídal I., Frumar M., Jedelský J.,
    Optical characterization of chalcogenide thin films,
    Applied Surface Science 175–176 (2001) 555–561
  2. Ohlídal I., Franta D.,
    Ellipsometry of thin film systems,
    Progress in Optics 41 (2000) 181-282
  3. Franta D., Ohlídal I., Klapetek P.,
    Analysis of slightly rough thin films by optical methods and AFM,
    Mikrochimica Acta 132 (2000) 443–447
  4. Zajíčková L., Buršíková V., Franta D.,
    The influence of substrate emissivity on plasma enhanced CVD of diamond-like carbon films,
    Czechoslovak Journal of Physics 49 (1999) 1213–1228
  5. Ohlídal I., Franta D., Pinčík E., Ohlídal M.,
    Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy,
    Surface and Interface Analysis 28 (1999) 240–244
  6. Franta D., Ohlídal I., Munzar D., Hora J., Navrátil K., Manfredotti C., Fizzotti F., Vittone E.,
    Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry,
    Thin Solid Films 343–344 (1999) 295–298
  7. Franta D., Ohlídal I.,
    Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
    Journal of Modern Optics 45 (1998) 903–934
  8. Franta D., Ohlídal I., Munzar D.,
    Parameterisation of the model of dispersion dependences of solid state optical constants,
    Acta Physica Slovaca 48 (1998) 451–458
  9. Ohlídal I., Líbezný M.,
    Ellipsometric analysis of gallium arsenide surfaces,
    Surface and Interface Analysis 17 (1991) 171–176