Jan Mistrík, Tomuo Yamaguchi, Daniel Franta, Ivan Ohlídal, Gu Jin Hu, Ning Dai

Optical properties of slightly rough LaNiO₃ thin films studied by spectroscopic ellipsometry and reflectometry

Applied Surface Science 244 (2005) 431–434

Optical characterization of sol-gel deposited lanthanum nickel oxide, LaNiO3 (LNO) film on Pt-coated Si substrate was performed by spectroscopic ellipsometry and reflectometry. The sum of five Lorentz oscillators was used for LNO dispersion parameterization in spectral range from 190 to 1000 nm. Two theoretical approaches: Raileigh-Rice theory (RRT) and effective medium approximation (EMA) were considered to account for the effect of LNO upper boundary roughness. Root mean square (rms) values of the heights of irregularities obtained by atomic force microscopy (AFM) and RRT were 2.09 and 5.62 nm, respectively. Effective layer thickness in EMA approach was found to be 4.62 nm. Higher values of roughness determined from optical methods with respect to the AFM may be assigned to the effect of convolution of AFM tip and boundary irregularities.

Download PDF (112 kB)

This article may also be available to you online

You can also contact one of the authors: franta@physics.muni.cz, ohlidal@physics.muni.cz

Citing Articles

1. Mykhaylyk T.A., Dmitruk N.L., Evans S.D., Hamley I.W., Henderson J.R.,
   Comparative characterisation by atomic force microscopy and ellipsometry of soft and solid thin films,
   Surface and Interface Analysis 39 (2007) 575–581
2. Noun W., Berini B., Dumont Y., Dahoo P. R., Keller N.,
   Correlation between electrical and ellipsometric properties on high-quality epitaxial thin films of the conductive oxide LaNiO₃ on STO,
   Journal of Applied Physics 102 (2007) 063709
3. Berini B., Noun W., Dumont Y., Popova E., Keller N.,
   High temperature ellipsometry of the conductive oxide LaNiO₃,
   Journal of Applied Physics 101 (2007) 023529
4. Su W.-T., Li B., Liu D.-Q., Zhang F.-S.,
   Structure and infrared optical properties of evaporated erbium fluoride films,
   Physica Status Solidi A 204 (2007) 569–575
5. Su W.-T., Li B., Liu D.-Q., Zhang F.-S.,
   Texture evolution and infrared optical properties of praseodymium fluoride films,
   Optical Materials 30 (2007) 273–278
6. Su W.-T., Li B., Liu D.-Q., Zhang F.-S.,
   The relation between crystal structure and infrared optical properties of ErF₃ film,
   Review of Scientific Instruments 56 (2007) 2541–2546
7. Bharadwaja S. S. N., Dechakupt T., Trolier-McKinstry S., Beratan H.,
   Excimer laser crystallized (Pb,La)(Zr,Ti)O-3 thin films,
   Journal of the American Ceramic Society 91 (2008) 1580–1585
8. Hu Z. G., Li Y. W., Zhu M., Zhu Z. Q., Chu J. H.,
   Structure and optical properties of ferroelectric PbZr_0.40Ti_0.60O₃ films grown on LaNiO₃-coated platinized silicon determined by infrared spectroscopic ellipsometry,
   Journal of Physical Chemistry C 112 (2008) 9737–9743
9. Guan L., Liu B., Jin L., Guo J., Zhao Q., Wang Y., Fu G.,
   Electronic structure and optical properties of LaNiO₃: First-principles calculations,
   Solid State Communications 150 (2010) 2011–2014
10. Yu T.-Y., Qin Y., Liu D.-Q., Zhang F.-S.,
    Physical and infrared optical properties of mixed SrF₂-CaF₂ thin films,
    Review of Scientific Instruments 59 (2010) 2546–2550

Cited Articles

1. Franta D., Zajíčková L., Ohlídal I., Janča J., Veltruská K.,
   Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry,
   Diamond and Related Materials 11 (2002) 105–117
2. Ohlídal I., Franta D.,
   Ellipsometry of thin film systems,
   Progress in Optics 41 (2000) 181-282
3. Franta D., Ohlídal I.,
   Optical characterization of inhomogeneous thin films of ZrO₂ by spectroscopic ellipsometry and spectroscopic reflectometry,
   Surface and Interface Analysis 30 (2000) 574–579
4. Franta D., Ohlídal I.,
   Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
   Journal of Modern Optics 45 (1998) 903–934