Daniel Franta, Ivan Ohlídal, Dominik Munzar, Jaroslav Hora, Karel Navrátil, Claudio Manfredotti, Franco Fizzotti, Ettore Vittone
Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry
Thin Solid Films 343–344 (1999) 295–298
In this paper the method based on interpreting the data measured within variable angle of incidence spectroscopic ellipsometry and spectroscopic reflectometry is used for the complete optical analysis of hydrogenated amorphous silicon layers deposited on silicon single crystal wafers. This method enables us to perform the analysis of these layers in a relatively wide spectral region because of both roughness and native oxide layer existing on the upper boundary of every silicon layer studied is respected at its analysis. The results obtained for a chosen sample of the hydrogenated amorphous silicon layer are presented.
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You can also contact one of the authors: franta@physics.muni.cz, ohlidal@physics.muni.cz
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Cited Articles
-
Franta D., Ohlídal I.,
Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
Journal of Modern Optics 45 (1998) 903–934 -
Franta D., Ohlídal I., Munzar D.,
Parameterisation of the model of dispersion dependences of solid state optical constants,
Acta Physica Slovaca 48 (1998) 451–458 -
Ohlídal I., Navrátil K.,
Simple method of spectroscopic reflectometry for the complete optical analysis of weakly absorbing thin films: Application to silicon films,
Thin Solid Films 156 (1988) 181–189 -
Ohlídal I., Navrátil K., Lukeš F.,
Reflection of Light by a System of Nonabsorbing Isotropic Film-Nonabsorbing Isotropic Substrate with Randomly Rough Boundaries,
Journal of the Optical Society of America 61 (1971) 1630–1639