Daniel Franta, Ivan Ohlídal, Miloslav Frumar, Jaroslav Jedelský
Optical characterization of chalcogenide thin films
Applied Surface Science 175–176 (2001) 555–561
In this paper the optical characterization of a film of amorphous As–S chalcogenides evaporated on glass substrates will be performed using variable angle of incidence spectroscopic ellipsometry (VASE) and near normal incidence spectroscopic reflectometry (NNSR). The spectral dependences of the ellipsometric parameters and reflectance of the chalcogenide thin film mentioned is measured within the near-UV, visible and near-IR spectral regions. For interpreting these optical quantities the new dispersion model of the spectral dependences of the optical constants of amorphous solids is employed. This model is based on the modified Lorentz oscillator. Within this model the concepts of the band gap and Urbach tail are respected.
This article may also be available to you online
You can also contact one of the authors: franta@physics.muni.cz, ohlidal@physics.muni.cz
Citing Articles
- Ohlídal I., Franta D., Frumar M., Jedelský J., Navrátil K.,
Complete optical analysis of amorphous As–S chalcogenide thin films by the combined spectrophotometric method,
Journal of Optoelectronics and Advanced Materials 3 (2001) 873–878 - Franta D., Zajíčková L., Ohlídal I., Janča J., Veltruská K.,
Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry,
Diamond and Related Materials 11 (2002) 105–117 - Franta D., Ohlídal I., Frumar M., Jedelský J.,
Expression of the optical constants of chalcogenide thin films using the new parameterization dispersion model,
Applied Surface Science 212–213 (2003) 116–121 - Franta D., Ohlídal I., Buršíková V., Zajíčková L.,
Optical properties of diamond-like carbon films containing SiOx,
Diamond and Related Materials 12 (2003) 1532–1538 - Akaoglu B., Atilgan I., Katircioglu B.,
Thickness and optical constant distributions of PECVD a-SiCx:H thin films along electrode radial direction,
Thin Solid Films 437 (2003) 257–265 - Ohlídal I., Franta D., Frumar M., Jedelský J., Omasta J.,
Influence of composition, exposure and thermal annealing on optical properties of As–S chalcogenide thin films,
Chalcogenide Letters 1 (2004) 1–10 - Franta D., Ohlídal I., Klapetek P., Montaigne-Ramil A., Bonanni A., Stifter D., Sitter H.,
Optical properties of ZnTe films prepared by molecular beam epitaxy,
Thin Solid Films 468 (2004) 193–202 - Baník I.,
An explanation of optical phenomena in non-crystalline semiconductors,
Central European Journal of Physics 3 (2005) 270–302 - Ohlídal I., Franta D., Šiler M., Vižďa F., Frumar M., Jedelský J., Omasta J.,
Comparison of dispersion models in the optical characterization of As–S chalcogenide thin films,
Journal of Non-Crystalline Solids 352 (2006) 5633–5641 - Serényi M., Lohner T., Zolnai Z., Petrik P., Nemcsics Á., Khánh N. Q., Turmezei P.,
Studies on the RF sputtered amorphous SiGe thin films,
Inorganic Materials 42 (2006) 3–6 - Serényi M., Lohner T., Petrik P., Frigeri C.,
Comparative analysis of amorphous silicon and silicon nitride multilayer by spectroscopic ellipsometry and transmission electron microscopy,
Thin Solid Films 515 (2007) 3559–3562. - Franta D., Nečas D., Ohlídal I., Hrdlička M., Pavlišta M., Frumar M., Ohlídal M.,
Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films,
Journal of Optoelectronics and Advanced Materials 11 (2009) 1891–1898 - Šantić B.,
Measurement of the refractive index and thickness of a transparent film from the shift of the interference pattern due to the sample rotation,
Thin Solid Films 518 (2010) 3619–3624 - Todorov R., Paneva A., Petkov K.,
Optical characterization of thin chalcogenide films by multiple-angle-of-incidence ellipsometry,
Thin Solid Films 518 (2010) 3280–3288 - Solieman A., Abu-sehly A. A.,
Determination of the optical constants of amorphous As(x)S(100-x) films using effective-medium approximation and OJL model,
Materials Chemistry and Physics 129 (2011) 1000-1005
Cited Articles
-
Ohlídal I., Franta D.,
Matrix formalism for imperfect thin films,
Acta Physica Slovaca 50 (2000) 489–500 -
Franta D., Ohlídal I.,
Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry,
Surface and Interface Analysis 30 (2000) 574–579 -
Franta D., Ohlídal I., Munzar D., Hora J., Navrátil K., Manfredotti C., Fizzotti F., Vittone E.,
Complete optical characterization of imperfect hydrogenated amorphous silicon layers by spectroscopic ellipsometry and spectroscopic reflectometry,
Thin Solid Films 343–344 (1999) 295–298 -
Franta D., Ohlídal I.,
Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
Journal of Modern Optics 45 (1998) 903–934 -
Franta D., Ohlídal I., Munzar D.,
Parameterisation of the model of dispersion dependences of solid state optical constants,
Acta Physica Slovaca 48 (1998) 451–458