Achintya Singha, Aditi Ghosh, Anushree Roy, Nihar Ranjan Ray
Quantitative analysis of hydrogenated diamondlike carbon films by visible Raman spectroscopy
Journal of Applied Physics 100 (2006) 044910
The correlations between properties of hydrogenated diamondlike carbon films and their Raman spectra have been investigated. The films are prepared by plasma deposition technique, keeping different hydrogen to methane ratios during the growth process. The hydrogen concentration, sp3 content, hardness, and optical Tauc gap of the materials have been estimated from a detailed analysis of their Raman spectra. We have also measured the same parameters of the films by using other commonly used techniques, such as sp3 content in films by x-ray photoelectron spectroscopy, their Tauc gap by ellipsometric measurements, and hardness by microhardness testing. The reasons for the mismatch between the characteristics of the films, as obtained by Raman measurements and by the above mentioned techniques, have been discussed. We emphasize on the importance of the visible Raman spectroscopy in reliably predicting the above key properties of diamondlike carbon films.
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Franta D., Zajíčková L., Ohlídal I., Janča J., Veltruská K.,
Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry,
Diamond and Related Materials 11 (2002) 105–117 -
Ohlídal I., Franta D., Pinčík E., Ohlídal M.,
Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy,
Surface and Interface Analysis 28 (1999) 240–244