M. Smietana, M.L. Korwin-Pawlowski, J. Grabarczyk, J. Szmidt
Correlation between thickness and optical properties of thin diamond-like carbon films deposited with RF PACVD method
Materials Science and Engineering B 165 (2009) 132–134
The paper discusses optical properties and thickness of the diamond-like carbon (DLC) films deposited with Radio Frequency Plasma Assisted Chemical Vapour Deposition (RF PACVD) method onto (111) oriented silicon substrates. Measurements performed with spectroscopic ellipsometer indicated a significant influence of both self-bias voltage and deposition time on thickness and refractive index of the DLC films. It was also found that optical properties are strongly deposition time dependent. Determination of DLC film thickness with constant optical properties cannot be realized just by adjusting deposition time.
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Franta D., Zajíčková L., Ohlídal I., Janča J., Veltruská K.,
Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry,
Diamond and Related Materials 11 (2002) 105–117