Main page | Journal list | Log-in

Lenka Zajíčková, Vilma Buršíková, Vratislav Peřina, Anna Macková, Deepak Prasad Subedi, Jan Janča

Plasma Modification of Polycarbonates

Surface and Coatings Technology 142 (2001) 449–454

We deposited protective coatings on polycarbonates from hexamethyldisiloxane (HMDSO) and HMDSO/O-2 mixtures by the plasma enhanced CVD method. In particular, we studied deposition rate, optical constants in UV/VIS, film composition and mechanical properties dependent on rf power and oxygen to HMDSO flow rate ratio. Plasma polymer HMDSO films (PP-HMDSO) showed good transparency in the visible and increased absorption in UV region. The optical constants of HMDSO/O-2 films were similar to the tabulated SiO2. In general, the films were characterised by a relatively high content of hydrogen (22-66%) and a carbon content below 20%. The films deposited at an oxygen-to-HMDSO flow rate ratio higher than 15 exhibited higher tensile stress and higher hardness than those prepared at ratios of 5-10. The nature of the internal stress changed to compressive for PP-HMDSO. Plasma pre-treatment of polycarbonate in argon significantly improved the film adherence, especially when low powers and short treatment times were used.

Download PDF (380 kB)

This article may also be available to you online

You can also contact one of the authors:,

Citing Articles

  1. Hozumi A., Wu Y. F., Hayashi K, Sugimura H, Takai O, Yokogawa Y, Kameyama T,
    Micro-wear resistance of ultrathin silicon oxide film-covered polymer substrate,
    Surface Science 532 (2003) 1056-1060
  2. Biederman H., Stelmashuk V., Kholodkov I, Choukourov A., Slavínská D.,
    RF sputtering of hydrocaarbon polymers and their derivatives,
    Surface and Coatings Technology 174 (2003) 27-32
  3. Barranco A, Cotrino J, Yubero F, Girardeau T, Camelio S, Gonzalez-Elipe AR,
    A structural study of organo-silicon polymeric thin films deposited by remote microwave plasma enhanced chemical vapour deposition,
    Surface and Coatings Technology 180 (2004) 244-249
  4. Opalinska T., Ulejczyk B., Karpinski L., Schmidt-Szalowski K.,
    Deposition of thin films based on silica on polycarbonates by pulsed dielectric barrier discharge,
    Polimery 49 (2004) 257-263
  5. Trunec D., Navrátil Z., Sťahel P., Zajíčková L., Buršíková V.,
    Deposition of Thin Organosilicon Polymer Films in Atmospheric Pressure Glow Discharge,
    Journal of Physics D 37 (2004) 2112–2120
  6. Lim KB, Lee DC,
    Surface modification of glass and glass fibres by plasma surface treatment,
    Surface and Interface Analysis 36 (2004) 254-258
  7. Přikryl R., Čech V., Zajíčková L., Vaněk J., Behzadi S., Jones R.,
    Mechanical and Optical Properties of Plasma-Polymerized Vinyltriethoxysilane,
    Surface and Coatings Technology 200 (2005) 468–471
  8. Jašek O., Eliáš M., Zajíčková L., Kudrle V., Bublan M., Matějková J., Rek A., Buršík J., Kadlečíková M.,
    Carbon Nanotubes Synthesis in Microwave Plasma Torch at Atmospheric Pressure,
    Materials Science and Engineering C 26 (2006) 1189–1193
  9. Bousquet A., Buršíková V., Goullet A., Djouadi A., Zajíčková L., Granier A.,
    Comparison of structure and mechanical properties of SiO(2)-like films deposited in O(2)/HMDSO pulsed and continuous plasmas,
    Surface and Coatings Technology 200 (2006) 6517-6521
  10. Ulejczyk B., Karpinski L., Scholz M., Ekwinska M. A., Rymuza Z., Opalinska T., Zukowska E. A., Schmidt-Szalowski K.,
    Deposition of silicon oxide film from tetraethoxysilane using a pulsed dielectric barrier discharge,
    Czechoslovak Journal of Physics 56 (2006) B1383-B1390
  11. Ulejczyk B., Karpinski L., Scholz M., Ekwinska M. A., Rymuza Z., Opalinska T., Zukowska E. A., Schmidt-Szalowski K.,
    Deposition of silicon oxide film from tetraethoxysilane using a pulsed dielectric barrier discharge,
    Czechoslovak Journal of Physics 56 (2006) B1383-B1390
  12. Sentek J., Kus M, Schmidt-Szalowski K.,
    Deposition of thin coatings on polyethylene films under conditions of pulsed dielectric harrier discharges (PDBD),
    Przemysl Chemiczny 85 (2006) 258-265
  13. Bousquet A., Granier A., Goullet A., Landesman J. P.,
    Influence of plasma pulsing on the deposition kinetics and film structure in low pressure oxygen/hexamethyldisiloxane radiofrequency plasmas,
    Thin Solid Films 514 (2006) 45-51
  14. Wang X.-D., Grundmeier G,
    Morphology and patterning processes of thin organosilicon and perfluorinated bi-layer plasma polymer films,
    Plasma Processes and Polymers 3 (2006) 39-47
  15. Simor M., Fiala A., Kovacik D., Hlidek P., Wypkema A., Kuipers R.,
    Corrosion protection of a thin aluminium layer deposited on polyester,
    Surface and Coatings Technology 201 (2007) 7802-7812
  16. Zajíčková L., Buršíková V., Kučerová Z., Franta D., Dvořák P., Šmíd R., Peřina V., Macková A.,
    Deposition of protective coatings in RF organosilicon discharges,
    Plasma Sources Science and Technology 16 (2007) S123–S132
  17. Begou T., Beche B., Goullet A., Granier A., Cardinaud C., Gaviot E., Camberlein L., Grossard N., Jezequel G., Zyss J., Landesman J. P.,
    First developments for photonics integrated on plasma-polymer-HMDSO: Single-mode TE00-TM00 straight waveguides,
    Optical Materials 30 (2007) 657-661
  18. Saloum S., Naddaf M.,
    Optical constants of silicone-like (Si : O-x : C-y : H-z) thin films deposited on quartz using hexamethyldisiloxane in a remote RF hollow cathode discharge plasma,
    Vacuum 82 (2007) 50-55
  19. Garcia-Luis A., Corengia P., Gonzalez-Santamaria D., Brizuela M., Braceras I., Briz N., Azpiroz P., Bellido-Gonzalez V., Powell S.,
    Synthesis and Characterization of Plasma-Polymerized HMDSO Films Using an Ion Gun Inverse Magnetron Source,
    Plasma Processes and Polymers 4 (2007) S766-S770
  20. Guo C. T.,
    Diamond-like carbon films deposited on polycarbonates by plasma-enhanced chemical vapor deposition,
    Thin Solid Films 516 (2008) 4053-4058
  21. Bousquet A., Goullet A., Leteinturier C., Coulon N., Granier A.,
    Influence of ion bombardment on structural and electrical properties of SiO2 thin films deposited from O-2/HMDSO inductively coupled plasmas under continuous wave and pulsed modes,
    European Physical Journal-Applied Physics 42 (2008) 3-8
  22. Panwar A. K., Barthwal S. K., Shivaprasad S. M., Ray S.,
    Physico-chemical characterization of a polycarbonate (PC) surface modified by exposure to dc glow discharge in air,
    Journal of Physics D 41 (2008) 001
  23. Subedi D. P., Madhup D. K., Adhikari K., Joshi U. M.,
    Plasma treatment at low pressure for the enhancement of wettability of polycarbonate,
    Indian Journal of Pure & Applied Physics 46 (2008) 540-544
  24. Panwar A. K., Barthwal S. K., Ray S.,
    Aging and Annealing Behavior of Polycarbonate Surfaces Modified by Direct-Current Glow Discharge in Air,
    Journal of Applied Polymer Science 112 (2009) 700-708
  25. Gomathi N., Eswaraiah C., Neogi S.,
    Surface Modification of Polycarbonate by Radio-Frequency Plasma and Optimization of the Process Variables with Response Surface Methodology,
    Journal of Applied Polymer Science 114 (2009) 1557-1566
  26. Fanelli F., Lovascio S., d\'Agostino R., Arefi-Khonsari F, Fracassi F.,
    Ar/HMDSO/O(2) Fed Atmospheric Pressure DBDs: Thin Film Deposition and GC-MS Investigation of By-Products,
    Plasma Processes and Polymers 7 (2010) 535-543
  27. Laskarakis A., Kassavetis S., Gravalidis C., Logothetidis S.,
    In situ and real-time optical investigation of nitrogen plasma treatment of polycarbonate,
    Nuclear Instruments and Methods in Physics Research Section B 268 (2010) 460-465
  28. Landreau X., Dublanche-Tixier C., Jaoul C., Le Niniven C., Lory N., Tristant P.,
    Effects of the substrate temperature on the deposition of thin SiO(x) films by atmospheric pressure microwave plasma torch (TIA),
    Surface and Coatings Technology 205 (2011) S335-S341
  29. Lin Y.-S., Weng M.-S., Chung T.-W., Huang C.,
    Enhanced surface hardness of flexible polycarbonate substrates using plasma-polymerized organosilicon oxynitride films by air plasma jet under atmospheric pressure,
    Surface and Coatings Technology 205 (2011) 3856-3864
  30. Cheng D. F., Yagihashi M., Hozumi A.,
    Lamination of Alumina Membranes to Polymer Surfaces: Thick, Hard, Transparent, Crack-Free Alumina Films on Polymers with Excellent Adhesion,
    ACS Applied Materials & Interfaces 3 (2011) 2224-2227
  31. Tamuleviciene A., Meškinis Š., Kopustinskas V., Tamulevičius S.,
    Multilayer amorphous hydrogenated carbon (a-C:H) and SiOx doped a-C:H films for optical applications,
    Thin Solid Films 519 (2011) 4004-4007
  32. Hall C. J., Murphy P. J., Griesser H. J.,
    Etching and Deposition Mechanism of an Alcohol Plasma on Polycarbonate and Poly(Methyl Methacrylate): An Adhesion Promotion Mechanism for Plasma Deposited a:SiOxCyHz Coating,
    Plasma Processes and Polymers 9 (2012) 855-865
  33. Kakiuchi H., Ohmi H., Yamada T., Yokoyama K., Okamura K., Yasutake K.,
    Silicon Oxide Coatings with Very High Rates (> 10 nm/s) by Hexamethyldisiloxane-Oxygen Fed Atmospheric-Pressure VHF Plasma: Film-Forming Behavior Using Cylindrical Rotary Electrode,
    Plasma Chem. Plasma Process. 32 (2012) 533-545

  34. Tailoring the mechanical properties of SiOxHyCz films deposited by atmospheric pressure microwave plasma torch with a Rechtschaffner design of experiments: A pragmatic statistical approach,
    Computational Materials Science 60 (2012) 32-43
  35. Zeytuncu B., Kahraman M. V., Yucel O.,
    Preparation and performance on polycarbonate of B/F/Si-containing hybrid coatings,
    Journal of Vacuum Science & Technology B 19 (2013) 39-46
  36. Manakhov A., Nečas D., Čechal J., Pavliňák D., Eliáš M., Zajíčková L.,
    Deposition of stable amine coating onto polycaprolactone nanofibers by low pressure cyclopropylamine plasma polymerization,
    Thin Solid Films 581 (2015) 7-13

Cited Articles

  1. Zajíčková L., Buršíková V., Janča J.,
    Protection Coatings for Polycarbonates Based on PECVD from Organosilicon Feeds,
    Vacuum 50 (1998) 19–21