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Ivan Ohlídal, Daniel Franta, Miloslav Ohlídal, Karel Navrátil

Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances

Applied Optics 40 (2001) 5711–5717

In this contribution a new efficient modification of a method that enables us to perform the optical characterization of nonabsorbing and weakly absorbing thin films without using the absolute values of the reflectances measured is presented. Namely, this modification is based on determining the values of the wavelengths corresponding to touching the spectral dependences of the reflectances of the studied films measured for several angles of incidence with the envelopes of maxima and minima of these spectral dependences. By means of combining the explicit formulas containing the wavelengths mentioned and the suitable iteration procedure one can evaluate the values of the thicknesses and spectral dependences of the refractive indices of the films analyzed in reliable and precise ways.

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Cited Articles

  1. Franta D., Ohlídal I., Klapetek P.,
    Analysis of slightly rough thin films by optical methods and AFM,
    Mikrochimica Acta 132 (2000) 443–447
  2. Ohlídal I., Franta D., Pinčík E., Ohlídal M.,
    Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy,
    Surface and Interface Analysis 28 (1999) 240–244
  3. Ohlídal I.,
    Optical analysis of inhomogeneous weakly absorbing thin films by spectroscopic reflectometry: Application to carbon films,
    Thin Solid Films 162 (1988) 101–109
  4. Ohlídal I., Navrátil K.,
    Determination of the optical parameters and packing density of non-absorbing columnar thin films by means of immersion reflectometry: Application to LiF thin films,
    Thin Solid Films 74 (1980) 51–58
  5. Ohlídal I., Navrátil K., Lukeš F.,
    Reflection of Light by a System of Nonabsorbing Isotropic Film-Nonabsorbing Isotropic Substrate with Randomly Rough Boundaries,
    Journal of the Optical Society of America 61 (1971) 1630–1639