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Vilma Buršíková, Petr Sládek, Pavel Sťahel, Lenka Zajíčková

Improvement of the Efficiency of the Silicon Solar Cells by Silicon Incorporated Diamond-Like Carbon Antireflective Coatings

Journal of Non-Crystalline Solids 299 (2002) 1147–1151

In order to obtain further improvement of the efficiency of the solar cells based on silicon we deposited upon the solar cells a silicon incorporated diamond-like carbon (DLC:Si) antireflective coating. Besides the improvement of the efficiency of the cells the DLC:Si coating serves as the hard protective coating. The films were prepared by plasma enhanced chemical vapour deposition (PECVD) technique from the mixture of hexamethyldisiloxane (HMDSO, C6H18Si2O) and methane. The optical and tribological properties of prepared coatings could be easily changed by the percentage of HMDSO in the deposition feed.

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