Agne Ciuciulkaite, Asta Tamuleviciene, Vitoldas Kopustinskas, Šarunas Meškinis, Sigitas Tamulevičius

Proc: INVESTIGATION OF THE OPTICAL AND WETTING PROPERTIES OF SiOx DOPED DLC FILMS

RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2012 (2012) pp.403-406

In this study, the SiOx doped diamond like carbon layers were formed employing hexamethyldisiloxane and acetylene carrier gas in a closed drift ion beam deposition system. Films were deposited varying ion beam energy from 300 eV to 800eV. Optical and surface wetting properties of the films were investigated. It was observed that change of ion beam energy does not have a major influence on the optical properties of the films but wetting properties of the films varied with ion beam energy and the contact angle of water for the films changed from 65 degrees to 77 degrees.

Cited articles

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   Improvement of the Efficiency of the Silicon Solar Cells by Silicon Incorporated Diamond-Like Carbon Antireflective Coatings,
   Journal of Non-Crystalline Solids 299 (2002) 1147–1151