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Šarunas Meškinis, Asta Tamuleviciene

Structure, Properties and Applications of Diamond Like Nanocomposite (SiO(x) Containing DLC) Films: A Review

Materials Science-Medziagotyra 17 (2011) 358-370

The present article reviews current situation on SiO(x) containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.

Cited Articles

  1. Zajíčková L., Buršíková V., Peřina V., Macková A., Janča J.,
    Correlation Between SiOx Content and Properties of DLC : SiOx Films Prepared by PECVD,
    Surface and Coatings Technology 174 (2003) 281–285
  2. Buršíková V., Sládek P., Sťahel P., Zajíčková L.,
    Improvement of the Efficiency of the Silicon Solar Cells by Silicon Incorporated Diamond-Like Carbon Antireflective Coatings,
    Journal of Non-Crystalline Solids 299 (2002) 1147–1151
  3. Buršíková V., Navrátil V., Zajíčková L., Janča J.,
    Temperature Dependence of Mechanical Properties of DLC/Si Protective Coatings Prepared by PECVD,
    Materials Science and Engineering A 324 (2002) 251–254