Šarunas Meškinis, Asta Tamuleviciene

Structure, Properties and Applications of Diamond Like Nanocomposite (SiO(x) Containing DLC) Films: A Review

Materials Science-Medziagotyra 17 (2011) 358-370

The present article reviews current situation on SiO(x) containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.

Cited Articles

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