Asta Tamuleviciene, Šarunas Meškinis, Vitoldas Kopustinskas, Sigitas Tamulevičius

Diamond like Carbon Film as Potential Antireflective Coating for Silicon Solar Cells

Materials Science-Medziagotyra 16 (2010) 103-107

In the present study DLC films were deposited on crystalline silicon and quartz substrates from hydrocarbon gases (acetylene (C(2)H(2)) and methane (CH(4))) by two methods: employing closed drift ion source and radio frequency plasma enhanced chemical vapour deposition (RF PECVD) technique. Optical properties of the formed films were analyzed employing UV/VIS/NIR spectroscopy. It was observed that in both deposition methods the lowest refractive index (at lambda = 632.8 nm), which corresponds to the highest amount of bound hydrogen, is observed when energies per carbon atom are approximately 150 eV (300 eV ion beam energy in a closed drift ion source) and 160 eV (400 V bias voltage in RF PECVD). It is shown that depending on the deposition conditions the region of minimum reflection for the system DLC-crystalline silicon can be varied in a wide range.

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1. Buršíková V., Sládek P., Sťahel P., Zajíčková L.,
   Improvement of the Efficiency of the Silicon Solar Cells by Silicon Incorporated Diamond-Like Carbon Antireflective Coatings,
   Journal of Non-Crystalline Solids 299 (2002) 1147–1151