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David Nečas, Daniel Franta, Vilma Buršíková, Ivan Ohlídal

Ellipsometric characterisation of thin films non-uniform in thickness

Thin Solid Films 519 (2011) 2715-2717

Ellipsometric formulae for thin films non-uniform in thickness are presented. A general type of thickness non-uniformity is considered and the influence of the varying angle of incidence is taken into account. The presented formulae are applied to the optical characterisation of polymer SiO2-like thin films exhibiting a relatively strong thickness non-uniformity. It is shown that the complete optical characterisation of these polymer thin films can be performed. Thus, the spectral dependences of the optical constants, mean thickness and parameters related to the shape of thickness non-uniformity can be determined.

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DOI: 10.1016/j.tsf.2010.12.065

You can also contact one of the authors: yeti@physics.muni.cz, franta@physics.muni.cz, vilmab@physics.muni.cz, ohlidal@physics.muni.cz

Citing Articles

  1. Nečas D., Ohlídal I., Franta D.,
    Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films,
    Journal of Optics 13 (2011) 085705

Cited Articles

  1. Ohlídal I., Nečas D., Franta D., Buršíková V.,
    Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry,
    Diamond and Related Materials 18 (2009) 364–367
  2. Nečas D., Ohlídal I., Franta D.,
    The reflectance of non-uniform thin films,
    Journal of Optics A: Pure and Applied Optics 11 (2009) 045202
  3. Franta D., Nečas D., Zajíčková L.,
    Models of dielectric response in disordered solids,
    Optics Express 15 (2007) 16230–16244