Main page | Journal list | Log-in

Zdeněk Frgala, Ondřej Jašek, Monika Karásková, Lenka Zajíčková, Vilma Buršíková, Daniel Franta, Jiřina Matějková, Antonín Rek, Petr Klapetek, Jiří Buršík

Microwave PECVD of nanocrystalline diamond with RF induced bias nucleation

Czechoslovak Journal of Physics 56 (2006) B1218–B1223

Nanocrystalline diamond film was deposited by microwave CVD in the ASTeX type reactor on a mirror polished (111) oriented n-doped silicon substrate. The deposition mixture consisted of 9% of methane in hydrogen. The applied microwave power (2.45 GHz) and pressure were 850 W and 7.5 kPa, respectively. The substrate temperature was 1090 K. The diamond nucleation process was enhanced by rf induced dc self-bias of –125 V. The film exhibited very low roughness (rms of heights 9.1 nm). Its hardness and elastic modules were 70 and 375 GPa, respectively. The optical constants were determined by combination of spectroscopic ellipsometry and reflectometry employing the Rayleigh–Rice theory for the roughness and the dispersion model of optical constants based on the parameterization of densities of states. The deposition rate was 57 nm/min including the 5 min nucleation step.

Download PDF (1975 kB)

This article may also be available to you online

You can also contact one of the authors:,,,

Citing Articles

  1. Franta D., Zajíčková L., Karásková M., Jašek O., Nečas D., Klapetek P., Valtr M.,
    Optical characterization of ultrananocrystalline diamond films,
    Diamond and Related Materials 17 (2008) 1278–1282
  2. Karásková M., Zajíčková L., Buršíková V., Franta D., Nečas D., Bláhová O., Šperka J.,
    Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges,
    Surface and Coatings Technology 204 (2010) 1997–2001
  3. Srikanth V. V. S. S.,
    Review of advances in diamond thin film synthesis,
    Japanese Journal of Applied Physics 226 (2012) 303-318

Cited Articles

  1. Franta D., Ohlídal I.,
    Comparison of effective medium approximation and Rayleigh–Rice theory concerning ellipsometric characterization of rough surfaces,
    Optics Communications 248 (2005) 459–467
  2. Franta D., Ohlídal I., Buršíková V., Zajíčková L.,
    Optical properties of diamond-like carbon films containing SiOx studied by the combined method of spectroscopic ellipsometry and spectroscopic reflectometry,
    Thin Solid Films 455–456 (2004) 393–398