Main page | Journal list | Log-in

Monika Karásková, Lenka Zajíčková, Vilma Buršíková, Daniel Franta, David Nečas, Olga Bláhová, Jiří Šperka

Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges

Surface and Coatings Technology 204 (2010) 1997–2001

Ultrananocrystalline diamond (UNCD) films were deposited directly on polished silicon substrates in microwave discharge (2.45 GHz) combined with rf capacitive plasma (13.56 MHz) ignited at the substrate electrode. The rf discharge induced a dc self-bias accelerating ions towards the growing film during the whole deposition process. The applied microwave and rf powers were 900 W and 35 W, respectively. The gas mixture contained 9.4% of methane in hydrogen at the total pressure of 7.5 kPa. The substrate was either preheated in hydrogen discharge to the deposition temperature of 900 C or the deposition of intermediate layer started at about 200 C and reached 900 C in the 5th minute. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analysis of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing diamond like carbon and SiC materials.

Download PDF (1073 kB)

This article may also be available to you online

You can also contact one of the authors:,,,

Citing Articles

  1. Hess P.,
    The mechanical properties of various chemical vapor deposition diamond structures compared to the ideal single crystal,
    Journal of Applied Physics 111 (2012) 15

Cited Articles

  1. Franta D., Zajíčková L., Karásková M., Jašek O., Nečas D., Klapetek P., Valtr M.,
    Optical characterization of ultrananocrystalline diamond films,
    Diamond and Related Materials 17 (2008) 1278–1282
  2. Franta D., Nečas D., Zajíčková L.,
    Models of dielectric response in disordered solids,
    Optics Express 15 (2007) 16230–16244
  3. Frgala Z., Jašek O., Karásková M., Zajíčková L., Buršíková V., Franta D., Matějková J., Rek A., Klapetek P., Buršík J.,
    Microwave PECVD of nanocrystalline diamond with RF induced bias nucleation,
    Czechoslovak Journal of Physics 56 (2006) B1218–B1223