Main page | Journal list | Log-in

A. C. Galca, V. Stancu, M. A. Husanu, C. Dragoi, N. G. Gheorghe, L. Trupina, M. Enculescu, E. Vasile

Substrate-target distance dependence of structural and optical properties in case of Pb(Zr,Ti)O-3 films obtained by pulsed laser deposition

Applied Surface Science 257 (2011) 5938-5943

The paper presents the influence of pulsed laser deposition (PLD) parameters on the structural and optical properties of PZT thin films grown on platinum substrate. X-ray diffraction (XRD), spectroscopic ellipsometry (SE) and X-ray photoelectron spectroscopy (XPS) are used to determine the thin film properties. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) are employed to get additional information. By changing the distance between target and substrate, different crystalline orientations of PZT are obtained. The thin film thickness and its roughness, as well as the refractive index are also influenced by the chosen distance.

Download PDF (955 kB)

This article may also be available to you online

Cited Articles

  1. Franta D., Ohlídal I., Mistrík J., Yamaguchi T., Hu G. J., Dai N.,
    Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions,
    Applied Surface Science 244 (2005) 338–342