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Ivan Ohlídal

Optical analysis of inhomogeneous weakly absorbing thin films by spectroscopic reflectometry: Application to carbon films

Thin Solid Films 162 (1988) 101–109

In this paper a new method for the optical analysis of inhomogeneous weakly absorbing thin films is described. This method is based on the interpretation of the spectral dependences of the reflectances characterizing these films. All optical parameters characterizing the films mentioned are determined by explicit formulae. The spectral transmittance must sometimes be added to spectral reflectances for a complete analysis of inhomogeneous films. The method described can be applied to films whose spectral reflectances comprise a sufficient number of extrema. The method was employed for analysing inhomogeneous carbon films.

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