Daniel Franta, Ivan Ohlídal, Petr Klapetek, Růžena Nepustilová, Svatopluk Bajer

Characterization of polymer thin films deposited on aluminum films by the combined optical method and atomic force microscopy

Surface and Interface Analysis 38 (2006) 842–846

In this paper, the results of the optical characterization of polymer thin films, deposited by the plasma enhanced chemical vapor deposition on the aluminum films performed by the multisample modification of the optical method based on combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry, are presented. Within this characterization, the existence of roughness of the boundaries of the polymer films is taken into account by means of the Rayleigh–Rice theory. The optical constants of these films are described by the dispersion model based on parameterization of the density of electronic states. It is shown that the optical constants of the polymer films depend on their thicknesses, i.e. on the deposition times. Morphology of the upper boundaries of the polymer films is also studied using atomic force microscopy.

Download PDF (268 kB)

This article may also be available to you online

You can also contact one of the authors: franta@physics.muni.cz, ohlidal@physics.muni.cz

Citing Articles

1. Franta D., Ohlídal I., Buršíková V., Zajíčková L.,
   Modeling of dielectric response of Ge_xSb_yTe_z (GST) materials,
   Physica Status Solidi C 6 (2009) S59–S62

Cited Articles

1. Franta D., Ohlídal I.,
   Comparison of effective medium approximation and Rayleigh–Rice theory concerning ellipsometric characterization of rough surfaces,
   Optics Communications 248 (2005) 459–467
2. Franta D., Ohlídal I., Frumar M., Jedelský J.,
   Expression of the optical constants of chalcogenide thin films using the new parameterization dispersion model,
   Applied Surface Science 212–213 (2003) 116–121
3. Franta D., Ohlídal I., Klapetek P.,
   Analysis of slightly rough thin films by optical methods and AFM,
   Mikrochimica Acta 132 (2000) 443–447
4. Franta D., Ohlídal I.,
   Analysis of thin films by optical multi-sample methods,
   Acta Physica Slovaca 50 (2000) 411–421
5. Franta D., Ohlídal I.,
   Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
   Journal of Modern Optics 45 (1998) 903–934