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Lenka Zajíčková, Zuzana Kučerová, Daniel Franta, Vilma Buršíková, Vratislav Peřina, Anna Macková

Proc: Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane

Proceedings of Organic/Inorganic Hybrid Materials, MRS (2008) pp.159-164

Published by Materials Research Society

Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.

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Cited articles

  1. Zajíčková L., Buršíková V., Kučerová Z., Franta D., Dvořák P., Šmíd R., Peřina V., Macková A.,
    Deposition of protective coatings in RF organosilicon discharges,
    Plasma Sources Science and Technology 16 (2007) S123–S132
  2. Franta D., Ohlídal I., Frumar M., Jedelský J.,
    Expression of the optical constants of chalcogenide thin films using the new parameterization dispersion model,
    Applied Surface Science 212–213 (2003) 116–121