Lenka Zajíčková, Zuzana Kučerová, Daniel Franta, Vilma Buršíková, Vratislav Peřina, Anna Macková
Proc: Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane
Proceedings of Organic/Inorganic Hybrid Materials, MRS (2008) pp.159-164
Published by Materials Research Society
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
You may also contact one of the authors: lenkaz@physics.muni.cz, franta@physics.muni.cz, vilmab@physics.muni.cz
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Zajíčková L., Buršíková V., Kučerová Z., Franta D., Dvořák P., Šmíd R., Peřina V., Macková A.,
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Plasma Sources Science and Technology 16 (2007) S123–S132 -
Franta D., Ohlídal I., Frumar M., Jedelský J.,
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