Daniel Haško, Jaroslav Bruncko

AFM surface analysis of ZnO layers prepared by pulsed laser deposition at different oxygen pressures

Vacuum 84 (2009) 166–16

Polycrystalline thin films of zinc oxide were deposited by pulsed laser deposition onto silicon substrates at different oxygen partial pressures in the range of 1-35 Pa. For ablation of the sintered zinc oxide target a pulsed Nd:YAG laser was used. Other processing parameters such as laser pulse energy, pulse repetition rate, substrate temperature and deposition pressure were identical. The effect of oxygen pressure on the structural properties of the films was systematically studied by using atomic force microscopy. The surface morphology, average roughness S_a, root mean square S_q, and mean size of grains on selected places with 2 x 2 μm² area of prepared samples were evaluated. Detailed structural analysis confirmed that partial oxygen pressure leads to the modification of surface morphology. Mean grain size in height and lateral direction decreases with raising oxygen pressure from 1 to 5 Pa while the further increase of oxygen pressure from 5 to 35 Pa results in grain size enlargement The zinc oxide film formed at oxygen partial pressure 5 Pa shows smallest values of evaluated parameters (S_a=0.6 nm, S_q=0.7 nm and mean size of grains 50 nm).

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