Justin Henrie, Earl Parsons, Aaron R. Hawkins, Stephen M. Schultz
Spectrum sampling reflectometer
Surface and Interface Analysis 37 (2005) 568–572
In this work we demonstrate that the semi-continuous wavelength spectrum used by a reflectometer for thin-film determination can be replaced by a small set of fixed-wavelength sources. We demonstrate how this spectrum sampling reflectometer (SSR) can be implemented with low-cost visible light-emitting diodes (LEDs). A detailed analysis of the system is provided, showing how measurement error and the number of sources affect accuracy. A bench-top SSR was constructed that consisted of five low-cost LEDs with central wavelengths that ranged from 450 to 650 nm. Thickness measurements of the SSR were compared with measurements made by other commercially available equipment with <5% variation.
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