J. Orava, T. Wagner, J. Sik, J. Prikryl, M. Frumar, L. Benes

Optical properties and phase change transition in Ge(2)Sb(2)Te(5) flash evaporated thin films studied by temperature dependent spectroscopic ellipsometry

Journal of Applied Physics 104 (2008) 043523

We studied the optical properties of as-prepared (amorphous) and thermally crystallized (fcc) flash evaporated Ge(2)Sb(2)Te(5) thin films using variable angle spectroscopic ellipsometry in the photon energy range 0.54-4.13 eV. We employed Tauc-Lorentz (TL) model and Cody-Lorentz (CL) model for amorphous phase and TL model with one additional Gaussian oscillator for fcc phase data analysis. The amorphous phase has optical bandgap energy E(g)(opt)=0.65 eV (TL) or 0.63 eV (CL) slightly dependent on used model. The Urbach edge of amorphous thin film was found to be similar to 70 meV. Both models behave very similarly and accurately fit to the experimental data at energies above I eV. The CL model is more accurate in describing dielectric function in the absorption onset region. The thickness decreases similar to 7% toward fcc phase. The bandgap energy of fcc phase is significantly lower than amorphous phase, E(g)(opt)=0.53 eV. The temperature dependent ellipsometry revealed crystallization in the range 130-150 degrees C. The bandgap energy of amorphous phase possesses temperature redshift -0.57 meV/K (30-110 degrees C). The crystalline phase has more complex bandgap energy shift, first +0.62 meV/K (150-180 degrees C) followed by -0.29 meV/K (190-220 degrees C). The optical properties (refractive index, extinction coefficient, and optical bandgap energy) of as-prepared and fcc flash evaporated Ge(2)Sb(2)Te(5) thin films are very similar to those values previously reported for sputtered thin films.

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