Daniel Franta, Ivan Ohlídal, Petr Klapetek, Alberto Montaigne-Ramil, Alberta Bonanni, David Stifter, Helmut Stifter
Proc: Optical characterization of ZnSe thin films
Proceedings of 19th Congress of the International Commission for Optics: Optics for the Quality of Life, SPIE, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, SPIE (2003) pp.831-832
In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses.
You may also contact one of the authors: franta@physics.muni.cz, ohlidal@physics.muni.cz
Cited articles
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Franta D., Ohlídal I.,
Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
Journal of Modern Optics 45 (1998) 903–934