Main page | Journal list | Log-in

Šarunas Meškinis, Vitoldas Kopustinskas, Kestutis Šlapikas, Rimas Gudaitis, Sigitas Tamulevičius, Gediminas Niaura, Veronika Rinnerbauer, Kurt Hingerl

Proc: Optical properties of the undoped and SiOx doped DLC films - art. no. 65961L

Advanced Optical Materials, Technologies, and Devices (2007) pp.L5961


In present study DLC films were deposited by direct ion beam deposition. Hexamethyldisiloxane vapor and hydrogen gas mixture, mixture of the hexamethyldisiloxane with acetylene as well as acetylene gas alone has been used as a source of the hydrocarbons. Optical properties of the synthesized films were investigated by spectroscopic ellipsometry. Structure of the DLC films has been studied by means of the Raman spectroscopy. Effects of the technological deposition parameters such as composition of the gas precursors, ion beam energy, ion beam current density were considered.

This paper may also be available to you online

Cited articles

  1. Franta D., Ohlídal I., Buršíková V., Zajíčková L.,
    Optical properties of diamond-like carbon films containing SiOx studied by the combined method of spectroscopic ellipsometry and spectroscopic reflectometry,
    Thin Solid Films 455–456 (2004) 393–398
  2. Zajíčková L., Buršíková V., Peřina V., Macková A., Janča J.,
    Correlation Between SiOx Content and Properties of DLC : SiOx Films Prepared by PECVD,
    Surface and Coatings Technology 174 (2003) 281–285