Šarunas Meškinis, Vitoldas Kopustinskas, Kestutis Šlapikas, Rimas Gudaitis, Sigitas Tamulevičius, Gediminas Niaura, Veronika Rinnerbauer, Kurt Hingerl
Proc: Optical properties of the undoped and SiOx doped DLC films - art. no. 65961L
Advanced Optical Materials, Technologies, and Devices (2007) pp.L5961
Published by SPIE-INT SOC OPTICAL ENGINEERING
In present study DLC films were deposited by direct ion beam deposition. Hexamethyldisiloxane vapor and hydrogen gas mixture, mixture of the hexamethyldisiloxane with acetylene as well as acetylene gas alone has been used as a source of the hydrocarbons. Optical properties of the synthesized films were investigated by spectroscopic ellipsometry. Structure of the DLC films has been studied by means of the Raman spectroscopy. Effects of the technological deposition parameters such as composition of the gas precursors, ion beam energy, ion beam current density were considered.
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