Q. Ye, P. Y. Liu, Z. F. Tang, L. Zhai

Hydrophilic properties of nano-TiO₂ thin films deposited by RF magnetron sputtering

Vacuum 81 (2007) 627–631

Microstructure and hydrophilicity of nano-titanium dioxide (TiO₂) thin films, deposited by radio frequency magnetron sputtering, annealed at different temperatures, were studied by field emission scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and water contact angle methods. It is found that the crystal phase transforms from amorphous to rutile structure with increase of annealing temperature from room temperature to 800 °C. It is also indicated that the organic contaminants on the surface of the films can be removed and the oxygen vacancies can be reduced by the annealing treatment. Annealed at the temperature below 300 °C, amorphous TiO₂ thin films show rather poor hydrophilicity, and annealed at the temperature range from 400 to 650 °C, the super hydrophilicity anatase of TiO₂ thin films can be observed. However, when the annealing temperature reaches 800 °C the hydrophilicity of the films declines mainly derived from the appearance of rutile.

Download PDF (504 kB)

Cited Articles

1. Franta D., Ohlídal I., Petrýdes D.,
   Optical characterization of TiO₂ thin films by the combined method of spectroscopic ellipsometry and spectroscopic photometry,
   Vacuum 80 (2005) 159–162