Main page | Journal list | Log-in

Ivan Ohlídal, Daniel Franta, David Nečas

Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces

Thin Solid Films 571 (2014) 695-700

Expressions for ellipsometric quantities and reflectance are presented that are based on a heuristic combination of the Rayleigh-Rice theory and the scalar diffraction theory. The latter takes into account local slopes and shadowing. The second-order Rayleigh-Rice theory is used to express the local electric field on the rough surface and the obtained expressions are then used in the scalar diffraction theory instead of the expressions corresponding to a smooth surface. A numeric method of evaluation of the quadruple integral resulting from this combination of the two theories is developed, utilising a Gauss-like quadrature. The efficiency of the formulae is illustrated by optical characterisation of rough silicon and gallium arsenide surfaces created using anodic and thermal oxidation, respectively, and covered with native oxide layers. The optical characterisation employs variable-angle spectroscopic ellipsometry and spectroscopic reflectometry.

Download PDF (517 kB)

This article may also be available to you online

DOI: 10.1016/j.tsf.2014.02.092

You can also contact one of the authors:,,

Cited Articles

  1. Ohlídal I., Franta D., Pinčík E., Ohlídal M.,
    Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy,
    Surface and Interface Analysis 28 (1999) 240–244
  2. Franta D., Ohlídal I.,
    Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
    Journal of Modern Optics 45 (1998) 903–934