Ivan Ohlídal, Daniel Franta, David Nečas
Improved combination of scalar diffraction theory and RayleighRice theory and its application to spectroscopic ellipsometry of randomly rough surfaces
Thin Solid Films 571 (2014) 695700
Expressions for ellipsometric quantities and reflectance are presented that are based on a heuristic combination of the RayleighRice theory and the scalar diffraction theory. The latter takes into account local slopes and shadowing. The secondorder RayleighRice theory is used to express the local electric field on the rough surface and the obtained expressions are then used in the scalar diffraction theory instead of the expressions corresponding to a smooth surface. A numeric method of evaluation of the quadruple integral resulting from this combination of the two theories is developed, utilising a Gausslike quadrature. The efficiency of the formulae is illustrated by optical characterisation of rough silicon and gallium arsenide surfaces created using anodic and thermal oxidation, respectively, and covered with native oxide layers. The optical characterisation employs variableangle spectroscopic ellipsometry and spectroscopic reflectometry.
This article may also be available to you online
DOI: 10.1016/j.tsf.2014.02.092
You can also contact one of the authors: ohlidal@physics.muni.cz, franta@physics.muni.cz, yeti@physics.muni.cz
Cited Articles

Ohlídal I., Franta D., Pinčík E., Ohlídal M.,
Complete optical characterization of the SiO_{2}/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy,
Surface and Interface Analysis 28 (1999) 240–244 
Franta D., Ohlídal I.,
Ellipsometric parameters and reflectances of thin films with slightly rough boundaries,
Journal of Modern Optics 45 (1998) 903–934