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Maria Losurdo

Applications of ellipsometry in nanoscale science: Needs, status, achievements and future challenges

Thin Solid Films 519 (2011) 2575-2583

This paper provides an overview of the relationship between optical ellipsometric measurements and nanoscale science. This relationship is discussed by analyzing published papers, patents and nanomaterials investigated in laboratories and constituting commercial products. Specific challenges and needs for advancing ellipsometry exploitation in nanotechnology are also discussed in the frame of nanometrology standardization. The ellipsometric characterization of plasmonic gold nanoparticles supported on a silicon substrate is used as an example to discuss various issues related to the optical characterization of nanomaterials, i.e., the detection of buried interfaces, size effects on the dielectric function and the monitoring in real time of nanoparticles growth.

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Cited Articles

  1. Franta D., Ohlídal I.,
    Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry,
    Surface and Interface Analysis 30 (2000) 574–579