Šarunas Meškinis, Vitoldas Kopustinskas, Kestutis Šlapikas, Sigitas Tamulevičius, A. Guobienë, Rimas Gudaitis, V. Grigaliūnas

Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications

Thin Solid Films 515 (2006) 636–639

Ion beam deposited hydrogenated undoped as well as SiO_x (SiO_x+N₂, SiO_x+Ar) doped DLC thin films were deposited and evaluated as possible anti-adhesive layers for nanoimprint lithography. Film surface contact angle with water was investigated as a measure of the surface free energy and anti-sticking properties. Contact angle of the DLC films was independent of SiO_x doping and ion beam energy. Air-annealing resistance in terms of the contact angle with water of the synthesized diamond like carbon films was investigated. Optical transmittance spectra of the DLC films in UV–VIS range were measured to investigate it as possible anti-sticking layers for UV imprint lithography applications. DLC films with the most promising combination of the UVabsorption and anti-sticking properties were revealed. Preliminary imprint tests with uncoated and thin DLC film coated hot imprint stamps were performed.

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Cited Articles

1. Franta D., Ohlídal I., Buršíková V., Zajíčková L.,
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2. Franta D., Ohlídal I., Buršíková V., Zajíčková L.,
   Optical properties of diamond-like carbon films containing SiO_x studied by the combined method of spectroscopic ellipsometry and spectroscopic reflectometry,
   Thin Solid Films 455–456 (2004) 393–398