Vesna Janicki, H. Zorc
Refractive index profiling of CeO2 thin films using reverse engineering methods
Thin Solid Films 413 (2002) 198–202
In some recent papers it was shown that ZrO2 single films can be modeled using inhomogeneous models. A similar modeling approach to analyze CeO2 layers has been used. Films have been produced using a standard reactive evaporation technique. Following the measurement results, obtained by normal incidence transmission and variable angle spectroscopic ellipsometry, reverse engineering of the monolayer with its sub-layers has been performed. Novel in this method is that no assumption of refractive index profile is needed. A very good fit of the experimental data with the reverse engineered multi-layers has been obtained, showing that it is possible to find a fine substructure of analyzed films.
Cited Articles
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Franta D., Ohlídal I.,
Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry,
Surface and Interface Analysis 30 (2000) 574–579