Main page | Journal list | Log-in

Jan Hlávka, Ivan Ohlídal, František Vižďa, Helmut Sitter

New technique of measurement of optical parameters of thin films

Thin Solid Films 279 (1996) 209–212

A new technique of measurement of the optical parameters of a thin film deposited on a semiconductor substrate, making use of the substrate photovoltage, is presented. The principle of the method is explained and an evaluation of the experimental data is given as a verification of the technique.

Download PDF (383 kB)

This article may also be available to you online

You can also contact one of the authors:

Citing Articles

  1. Pavelka R., Ohlídal I., Hlávka J., Franta D., Sitter H.,
    Optical characterization of thin films with randomly rough boundaries using the photovoltage method,
    Thin Solid Films 366 (2000) 43–50