Lenka Zajíčková, Ondřej Jašek, Marek Eliáš, Petr Synek, Lukáš Lazar, Oldřich Schneeweiss, Renata Hanzlíková
Synthesis of carbon nanotubes by plasma- enhanced chemical vapor deposition in an atmospheric-pressure microwave torch
Pure and Applied Chemistry 82 (2010) 1259–1272
There are many different techniques for the synthesis of carbon nanotubes (CNTs), and plasma technologies experience a significant competitor in thermal chemical vapor deposition (CVD) processes. A particular process is, therefore, selected according to the specific requirements of an application, which clearly differ for the development of composites as compared to nanoelectronics, field emission, displays, sensors, and the like. This paper dis cusses the method for the synthesis of CNTs using an atmospheric-pressure microwave (MW) torch. It was successfully applied in the fast deposition of multiwalled nanotubes (MWNTs) on a substrate without the necessity of any vacuum or heating equipment. Dense straight-standing nanotubes were prepared on Si substrates with and also without barrier SiOx layer. Therefore, it was possible to produce CNTs directly on conductive Si and to use them as an electron-emitting electrode of the gas pressure sensor. The CNTs grown in MW torch were also used to create a gas sensor based on the changes of electrical resistance measured between two planar electrodes connected by the CNTs.
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You can also contact one of the authors: lenkaz@physics.muni.cz, jasek@physics.muni.cz, mareke@physics.muni.cz, synek@physics.muni.cz
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Jašek O., Eliáš M., Zajíčková L., Kučerová Z., Matějková J., Rek A., Buršík J.,
Discussion of Important Factors in Deposition of Carbon Nanotubes by Atmospheric Pressure Microwave Plasma Torch,
Journal of Physics and Chemistry of Solids 68 (2007) 738–743 -
Zajíčková L., Eliáš M., Jašek O., Kučerová Z., Synek P., Matějková J., Kadlečíková M., Klementová M., Buršík J., Vojačková A.,
Characterization of Carbon Nanotubes Deposited in Microwave Torch at Atmospheric Pressure,
Plasma Processes and Polymers 4 (2007) S245–S249 -
Zajíčková L., Eliáš M., Jašek O., Kudrle V., Frgala Z., Matějková J., Buršík J., Kadlečíková M.,
Atmospheric Pressure Microwave Torch for Synthesis of Carbon Nanotubes,
Plasma Phys. Control. Fusion 47 (2005) B655–B666