Shih-Chin Lee, Fong-Cheng Tai, Che-Hung Wei

Correlation between sp²/sp³ ratio or hydrogen content and water contact angle in hydrogenated DLC film

Materials Transactions 48 (2007) 2534–2538

Water contact angle has been measured to indirectly assess the sp²/sp³ ratio and hydrogen content of DLCH film under post N₂ annealed treatment with O₂ content under 100 ppm. XPS spectrum is used to measure the Cls bonding type and calculate the sp²/sp³ ratio. The surface morphology of DLCH film was examined by SEM and AFM. From experimental results, it seems the surface morphology was not a critical factor on water contact angle value, at least for DLCH film. A quantitative correlation between water contact angle and sp²/sp³ ratio of DLCH film is established from which the hydrogen content can be estimated by the sp²/sp³ ratio as well as Angus equation.

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