Main page | Journal list | Log-in

F. C. Tai, S. C. Lee, C. H. Wei, S. L. Tyan

Correlation between ID/IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film

Materials Transactions 47 (2006) 1847–1852

The hydrogened diamond like carbon film (DLCH) with 1 mu m thickness is made by hydrocarbon gas ion beam deposition method. The relationship between ID/IG ratio fitted from visible Raman spectra and sp2/sp3 ratio done from XPS spectra of DLCH film shows a trend. The ID/IG ratio of deconvoluted visible Raman spectra shows a correlation with sp2/sp3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The ID/IG ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp2/sp3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400 °C and without severe oxidation.

Download PDF (894 kB)

Cited Articles

  1. Franta D., Buršíková V., Ohlídal I., Zajíčková L., Sťahel P.,
    Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films,
    Diamond and Related Materials 14 (2005) 1795–1798