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Ondřej Jašek, Petr Synek, Lenka Zajíčková, Marek Eliáš, Vít Kudrle

Synthesis of Carbon Nanostructures by Plasma Enhanced Chemical Vapour Deposition at Atmospheric Pressure

Journal Of Electrical Engineering 61 (2010) 311-313

Carbon nanostructures present the leading field in nanotechnology research A wide range of chemical and physical methods was used for carbon nanostructures synthesis including arc discharges, laser ablation and chemical vapour deposition Plasma enhanced chemical vapour deposition (PECVD) with its application in modern microelectronics industry became soon target of research in carbon nanostructures synthesis Selection of the ideal growth process depends on the application Most of PECVD techniques work at low pressure requiring vacuum systems However for industrial applications it would be desirable to work at atmospheric pressure In this article carbon nanostructures synthesis by plasma discharges working at atmospheric pressure will be reviewed

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