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E Zaleta-Alejandre, A. N. Meza-Rocha, Z. Rivera-Alvarez, I. M. Sandoval, J. J. Araiza, M. Aguilar-Frutis, C. Falcony

Optical Characteristics of Silica Coatings Deposited by Ozone Assisted Spray Pyrolysis Technique

ECS Journal of Solid State Science and Technology 2 (2013) N145-N148

The synthesis of silica coatings by the Ultrasonic Spray Pyrolysis (USP) technique, using ozone and tetraethyl-orthosilicate (TEOS), is reported for different substrate temperatures in the 350 to 550 degrees C range. Deposition rates as high as 3500 angstrom. min(-1) at a substrate temperature of 550 degrees C were obtained. Average roughness values of up to similar to 11 angstrom were obtained for the different substrate temperatures and deposition times. FTIR spectroscopy measurements show characteristic SiO2 absorption bands associated with the Si-O-Si rocking, bending and stretching vibration modes at 450, 810 and 1070 cm(-1), respectively. The behavior of the refractive index for these films was determined by spectral ellipsometry in the 275 to 827 nm wavelength range. It was found that for 450 degrees C films the refractive index values lay within those reported for thermal and atomic layer deposited oxides. (C) 2013 The Electrochemical Society. All rights reserved.

DOI: 10.1149/2.009307jss

Cited Articles

  1. Ohlídal I., Franta D., Pinčík E., Ohlídal M.,
    Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy,
    Surface and Interface Analysis 28 (1999) 240–244