Kamil Postava, Mitsuro Aoyama, Tomuo Yamaguchi, H. Oda

Spectroellipsometric characterization of materials for multilayer coatings

Applied Surface Science 175 (2001) 276–280

The optical functions of titanium dioxide (TiO₂), tantalum pentoxide (Ta₂O₅) and silicon dioxide (SiO₂) have been determined in the spectral range from 1.5 to 5.4 eV (wavelength range from 230 to 840 nm). The ellipsometric spectra of 200 nm thick layers sputtered on a glass substrate were measured by a four-zone null spectroscopic ellipsometer. The data have been fitted by a Tauc–Lorentz model recently derived by Jellison and Modine for the optical functions of amorphous materials. The model dielectric function is based on a combination of the Tauc band edge and the Lorentz oscillator. The effects of the surface and interface layers and layer inhomogeneity on the measured data are discussed.

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