C. Ye, S.S. Pan, X.M. Teng, H.T. Fan, G.H. Li

Preparation and optical properties of nanocrystalline thin films in the ZnO-TiO₂ system

Applied Physics A 90 (2008) 375–378

Nanocrystalline compound thin films of ZnO-TiO₂ with different Zn/Ti atomic ratios were prepared by radio frequency magnetron reactive sputtering. The optical constants and the optical band gap were investigated using spectroscopic ellipsometry and the optical absorption spectrum. It was found that the cubic ZnTiO₃ phase can be obtained with the atomic ratio of Zn to Ti of about 1:1, and transforms to rhombohedral ZnTiO₃ phase and a phase mixture of rhombohedral ZnTiO₃ and ZnO with increasing Zn content. The refractive index decreases with the increase of Zn content, and the extinction coefficient in the visible range is near zero. The optical band gap was derived from the modeling of ellipsometry data and extinction coefficient spectra, and compared with that obtained from optical absorption spectrum, and it was found that the optical band gaps obtained by these three methods are consistent with each other.

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