Vesna Janicki, Jordi Sancho-Parramon, Olaf Stenzel, Marc Lappschies, Bjorn Goertz, Christoph Rickers, Christina Polenzky, Uwe Richter

Optical characterization of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements

Applied Optics 46 (2007) 6084–6091

A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analyzed optically based on spectrophotometric and spectroscopic ellipsometry measurements under different angles of incidence in order to precisely characterize the coatings. The Lorentz-Lorenz model has been used to calculate the refractive index of material mixtures in gradient and constant index layers of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition.

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