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C Alvarez-Macias, J Santoyo-Salazar, BM Monroy, MF Garcia-Sanchez, M Picquart, A Ponce, G Contreras-Puente, G Santana

Structure and morphology of films of pm-Si:H grown by PECVD varying dichlorosilane with hydrogen dilution and working pressure

Revista Mexicana de Fisica 57 (2011) 224-231

Cited Articles

  1. Franta D., Ohlídal I., Klapetek P., Roca i Cabarrocas P.,
    Complete characterization of rough polymorphous silicon films by atomic force microscopy and the combined method of spectroscopic ellipsometry and spectroscopic reflectometry,
    Thin Solid Films 455–456 (2004) 399–403